Design and fabrication of a highly manufacturable MEMS probe card for high speed testing

Journal of Micromechanics and Microengineering

Volumn 18, Issue 7, 2008, Pages

  Kim, Bong Hwan ^a   Kim, Jong Bok ^b  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

^b UniTest Inc   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

COBALT; COMPOSITE MICROMECHANICS; COMPRESSIVE STRESS; COPPER PLATING; ELECTROPLATING; ENERGY STORAGE; GOLD; HEALTH; LEAKAGE CURRENTS; MEMS; NICKEL; NICKEL ALLOYS; NICKEL PLATING; OPTICAL DESIGN; PHOTORESISTS; SOLUTIONS; TRANSITION METALS;

AU-SN SOLDER; CANTILEVER STRUCTURES; CONTACT FORCES; DEFLECTION (OVALIZATION); DRIVING VOLTAGES; ELECTRO MECHANICAL SYSTEMS; HIGH SPEED TESTING; HIGH-FREQUENCY (HF); MEMS PROBE CARD; MOVING STRUCTURES; PROBE CARD; TOTAL PATH RESISTANCE;

MICROELECTROMECHANICAL DEVICES;

EID: 47249110299     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/18/7/075031     Document Type: Article

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