A robust MEMS probe card with vertical guide for a fine pitch test

Journal of Micromechanics and Microengineering

Volumn 17, Issue 7, 2007, Pages 1350-1359

  Kim, Bong Hwan ^a,b   Kim, Hyeon Cheol ^b   Choi, Soon Don ^c   Chun, Kukjin ^b   Kim, Jong Bok ^a   Kim, Jong Hyun ^a  

^a UniTest Inc   (South Korea)

^b Seoul National University   (South Korea)

^c Yeungnam University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CANTILEVER BEAMS; CONTACT RESISTANCE; LEAKAGE CURRENTS; PHOTORESISTS; RELIABILITY ANALYSIS; SILICON COMPOUNDS;

DEVICE UNDER TEST (DUT); FINE PITCH TESTS; ROBUST MEMS PROBE CARD; TIP PLANARITY;

MICROELECTROMECHANICAL DEVICES;

EID: 34547588710     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/7/018     Document Type: Article

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