A fine pitch MEMS probe unit for flat panel display as manufacturing MEMS application

Sensors and Actuators, A: Physical

Volumn 115, Issue 1, 2004, Pages 46-52

  Kim, Bong Hwan ^a,b   Park, Sang Jun ^a,b   Chun, Kukjin ^a   Cho, Dong Il ^a   Park, Woong Ki ^c   Jun, Tae Un ^c   Yun, Soo ^c  

^a Seoul National University   (South Korea)

^b IC MEMS Inc   (South Korea)

^c Yulim Hitech Co Ltd   (South Korea)

Author keywords

FPD; LCD; MEMS; Probe unit

Indexed keywords

CATHODE RAY TUBES; FLAT PANEL DISPLAYS; IMAGE QUALITY; LIGHT EMITTING DIODES; LIQUID CRYSTAL DISPLAYS; OPTICAL RESOLVING POWER; TRANSISTORS;

MEMS; ORGANIC LIGHT EMITTING DEVICES (OLED); PROBE UNITS;

MICROELECTROMECHANICAL DEVICES;

EID: 4243103788     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2004.03.039     Document Type: Article

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