Silicon micro-probe card using porous silicon micromachining technology

ETRI Journal

Volumn 27, Issue 4, 2005, Pages 433-438

  Kim, Young Min ^a,b   Yoon, Ho Cheol ^b   Lee, Jong Hyun ^a  

^a Kyungpook National University   (South Korea)

^b Korea Abrasive Ind Co Ltd   (South Korea)

Author keywords

Contact resistance; Porous silicon micromachining; Probe beam; Silicon probe card

Indexed keywords

ANNEALING; CANTILEVER BEAMS; DRY ETCHING; ELECTRIC RESISTANCE; INTEGRATED CIRCUITS; MICROMACHINING; THERMAL EXPANSION;

CONTACT RESISTANCE; POROUS SILICON MICROMACHINING; PROBE BEAM; SILICON PROBE CARD;

POROUS SILICON;

EID: 23844494859     PISSN: 12256463     EISSN: None     Source Type: Journal    
DOI: 10.4218/etrij.05.0104.0080     Document Type: Article

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