Development of an electrostatically actuated MEMS switching probe card

Proceedings of the 50th IEEE Holm Conference on Electrical Contacts and the 22nd International Conference on Electrical Contacts

Volumn , Issue , 2004, Pages 226-230

  Itoh, Toshihiro ^a   Kawamura, Shingo ^a   Suga, Tadatomo ^a   Kataoka, Kenichi ^b  

^a UNIVERSITY OF TOKYO   (Japan)

^b UNIVERSITY OF TOKYO   (Japan)

Author keywords

Component; Electrostatic Actuator; MEMS Probe Card; Switching Contact

Indexed keywords

ACTUATORS; ELECTRIC CONTACTS; ELECTRIC POTENTIAL; ELECTROPLATING; ELECTROSTATICS; ETCHING; FREQUENCIES; MICROMACHINING; RESIDUAL STRESSES; SWITCHING CIRCUITS;

COMPONENT; ELECTROSTATIC ACTUATOR; MEMS PROBE CARD; MICROPROBES; SWITCHING CONTACT;

MICROELECTROMECHANICAL DEVICES;

EID: 16244377507     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)

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