Ti-Ni SMA film actuated Si cantilever beams for MEMS probe card

Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05

Volumn 1, Issue , 2005, Pages 733-736

  Namazu, Takahiro ^a   Inoue, Shozo ^a   Tashiro, Youichi ^a   Okamura, Yuuta ^a   Koterazawa, Keiji ^a  

^a UNIVERSITY OF HYOGO   (Japan)

Author keywords

Contact force; MEMS probe card; Shape memory alloy; Si cantilever beam; Ti Ni film

Indexed keywords

CONTACT FORCE; MEMS PROBE CARD; SI CANTILEVER BEAM; TI-NI FILM;

CANTILEVER BEAMS; NICKEL ALLOYS; PROBES; SEMICONDUCTING SILICON; SHAPE MEMORY EFFECT; THIN FILM DEVICES; TITANIUM ALLOYS;

MICROELECTROMECHANICAL DEVICES;

EID: 27544443711     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2005.1496521     Document Type: Conference Paper

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