Low contact-force and compliant MEMS probe card utilizing fritting contact

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2002, Pages 364-367

  Kataoka, Kenichi ^a   Kawamura, Shingo ^a   Itoh, Toshihiro ^a   Suga, Tadatomo ^a   Ishikawa, Kaoru ^a,b   Honma, Hideo ^a,b  

^a UNIVERSITY OF TOKYO   (Japan)

^b KANTO GAKUIN UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC BREAKDOWN; ELECTRIC CURRENT MEASUREMENT; ELECTRIC RESISTANCE MEASUREMENT; MICROELECTRODES; MICROMACHINING; PROBES; SEMICONDUCTOR DEVICE STRUCTURES; VOLTAGE MEASUREMENT;

ALUMINUM ELECTRODES; ELECTROPLATED NICKEL MICROCANTILEVER; FRETTING CONTACT; MICROELECTROMECHANICAL PROBE CARD;

MICROELECTROMECHANICAL DEVICES;

EID: 0036122669     PISSN: 10846999     EISSN: None     Source Type: Journal    
DOI: 10.1109/MEMSYS.2002.984278     Document Type: Article

References (10)