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Volumn 12, Issue 14, 2004, Pages 3055-3065

Subwavelength photolithography based on surface-plasmon polariton resonance

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; NANOTECHNOLOGY; PHOTORESISTORS; REFRACTION; SURFACE PLASMON RESONANCE; THICKNESS MEASUREMENT; ULTRAVIOLET RADIATION; WAVEFRONTS;

EID: 4644352724     PISSN: 10944087     EISSN: None     Source Type: Journal    
DOI: 10.1364/OPEX.12.003055     Document Type: Article
Times cited : (185)

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