157 nm: Deepest deep-ultraviolet yet

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 17, Issue 6, 1999, Pages 3262-3266

  Rothschild, M ^a   Bloomstein, T M ^a   Curtin, J E ^a   Downs, D K ^a   Fedynyshyn, T H ^a   Hardy, D E ^a   Kunz, R R ^a   Liberman, V ^a   Sedlacek, J H C ^a   Uttaro, R S ^a   Bates, A K ^b,d   Van Peski, C ^c,d  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

^b IBM   (United States)

^c SEMATECH   (United States)

^d MIT LINCOLN LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0033262709     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.591137     Document Type: Article

References (10)

1. T. M. Bloomstein, M. W. Horn, M. Rothschild, R. R. Kunz, S. T. Palmacci, and R. B. Goodman, J. Vac. Sci. Technol. B 15, 2112 (1997).
2. T. M. Bloomstein, M. Rothschild, R. R. Kunz, D. E. Hardy, R. B. Goodman, and S. T. Palmacci, J. Vac. Sci. Technol. B 16, 3154 (1998).
3. V. Liberman, M. Rothschild, J. H. C. Sedlacek, R. S. Uttaro, A. K. Bates, C. Van Peski, and T. M. Bloomstein, J. Vac. Sci. Technol. B (to be published).
4. R. R. Kunz, T. M. Bloomstein, and T. H. Fedynyshyn, J. Vac. Sci. Technol. B (to be published).
5. U. Stamm, presented at the 157 nm Lithography Workshop, Litchfield, AZ, 15-17 February 1999 (unpublished), organized by International SEMATECH.
6. T. Hoffman, J.-M Hueber, P. Das, and S. Scholler, presented at the 157 nm Lithography Workshop, Litchfield, AZ, 15-17 February 1999 (unpublished), organized by International SEMATECH.
7. V. Liberman, M. Rothschild, J. H. C. Sedlacek, R. S. Uttaro, A. Grenville, A. K. Bates, and C. Van Peski, Opt. Lett. 24, 58 (1999).
8. H. Okabe, Photochemistry of Small Molecules (Wiley, New York, 1978), pp. 178, 202.
9. J. Chang, A. Abdo, B. Kim, T. M. Bloomstein, R. Engelstad, E. Lovell, W. Beckman, and J. Mitchell, Proc. SPIE (to be published).
10. Handbook of Optical Constants of Solids, edited by E. D. Palik (Academic, San Diego, 1991), Vol. 2.