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Volumn 6689, Issue , 2007, Pages

Silicon photodiodes for absolute soft x-ray radiometry

Author keywords

Beamline; Calibration; Photodiode; Radiometry; Responsivity; Synchrotron; X ray

Indexed keywords

(100) SILICON; BEAM-LINES; BROOKHAVEN NATIONAL LABORATORY (BNL); ELECTRICAL CHARACTERISTICS; ENERGY RANGES; HIGH FLUX; INFRARED LIGHT; MONOCHROMATIC BEAMS; NATIONAL SYNCHROTRON LIGHT SOURCE (NSLS); OPTICAL DATA; PHOTON ENERGY RANGE; RESPONSIVITY; SELF CALIBRATION; SILICON DIOXIDES; SILICON PHOTODIODES; SOFT X RAY (SXR); SOLAR PHYSICS; SPACE WEATHER;

EID: 45549091002     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.741601     Document Type: Conference Paper
Times cited : (19)

References (45)
  • 1
    • 0037226192 scopus 로고    scopus 로고
    • Present Status of Radiometric Quality Silicon Photodiodes
    • R. Korde, C. Prince, D. Cunningham, et al., "Present Status of Radiometric Quality Silicon Photodiodes," Metrologia 40, S145-S149 (2003).
    • (2003) Metrologia , vol.40
    • Korde, R.1    Prince, C.2    Cunningham, D.3
  • 2
    • 0001630160 scopus 로고    scopus 로고
    • Stable Silicon Photodiodes for Absolute Intensity Measurements in the VUV and Soft X-Ray Regions
    • E. M. Gullikson, R. Korde, L. R. Canfield, et al., "Stable Silicon Photodiodes for Absolute Intensity Measurements in the VUV and Soft X-Ray Regions," J. Elec. Spec. Rel. Phen. 80, 313-316 (1996).
    • (1996) J. Elec. Spec. Rel. Phen , vol.80 , pp. 313-316
    • Gullikson, E.M.1    Korde, R.2    Canfield, L.R.3
  • 3
    • 77956703020 scopus 로고    scopus 로고
    • edited by J. A. Samson and D. E. Ederer Academic Press, San Diego, CA
    • L. R. Canfield, in Vacuum Ultraviolet Spectroscopy II, edited by J. A. Samson and D. E. Ederer (Academic Press, San Diego, CA, 1998), pp. 117-138.
    • (1998) Vacuum Ultraviolet Spectroscopy II , pp. 117-138
    • Canfield, L.R.1
  • 4
    • 0027809473 scopus 로고
    • One Gigarad Passivating Nitrided Oxides for 100% Internal Quantum Efficiency Silicon Photodiodes
    • R. Korde, J. S. Cable and L. R. Canfield, "One Gigarad Passivating Nitrided Oxides for 100% Internal Quantum Efficiency Silicon Photodiodes," IEEE Trans. Nucl. Sci. 40(6), 1655-1659 (1993).
    • (1993) IEEE Trans. Nucl. Sci , vol.40 , Issue.6 , pp. 1655-1659
    • Korde, R.1    Cable, J.S.2    Canfield, L.R.3
  • 5
    • 31744444632 scopus 로고    scopus 로고
    • Temperature Dependence of the EUV Responsivity of Silicon Photodiode Detectors
    • B. Kjornrattanawanich, R. Korde, C. N. Boyer, et al., "Temperature Dependence of the EUV Responsivity of Silicon Photodiode Detectors," IEEE Trans. Electron Devices 53(2), 218-223 (2006).
    • (2006) IEEE Trans. Electron Devices , vol.53 , Issue.2 , pp. 218-223
    • Kjornrattanawanich, B.1    Korde, R.2    Boyer, C.N.3
  • 6
    • 0000066043 scopus 로고    scopus 로고
    • Absolute Silicon Photodiodes for 160 nm to 254 nm Photons
    • L. R. Canfield, R. E. Vest, R. Korde, et al., "Absolute Silicon Photodiodes for 160 nm to 254 nm Photons," Metrologia 35, 329-334 (1998).
    • (1998) Metrologia , vol.35 , pp. 329-334
    • Canfield, L.R.1    Vest, R.E.2    Korde, R.3
  • 7
    • 45549096403 scopus 로고    scopus 로고
    • IRD
    • IRD, "IRD Website," [http://www.ird-inc.com/].
    • IRD Website
  • 8
    • 0034832089 scopus 로고    scopus 로고
    • The Impact of the Nitridation Process on the Properties of the Si-SiO2 Interface
    • M. L. Polignano, M. Alessandri, B. Crivelli, et al., "The Impact of the Nitridation Process on the Properties of the Si-SiO2 Interface," J. Non-Cryst. Solids 280, 39-47 (2001).
    • (2001) J. Non-Cryst. Solids , vol.280 , pp. 39-47
    • Polignano, M.L.1    Alessandri, M.2    Crivelli, B.3
  • 9
    • 0033190194 scopus 로고    scopus 로고
    • The Effects of Interfacial Suboxide Transition Regions on Direct Tunneling in Oxide and Stacked Oxide-Nitride Gate Dielectrics
    • H. Yang, H. Niimi, Y. Wu, et al., "The Effects of Interfacial Suboxide Transition Regions on Direct Tunneling in Oxide and Stacked Oxide-Nitride Gate Dielectrics," Microelectronic Engineering 48, 307-310 (1999).
    • (1999) Microelectronic Engineering , vol.48 , pp. 307-310
    • Yang, H.1    Niimi, H.2    Wu, Y.3
  • 10
    • 3843115732 scopus 로고    scopus 로고
    • Structure of Ultrathin SiO2/Si(111) Interfaces Studied by Photoelectron Spectroscopy
    • J. W. Keister, J. E. Rowe, J. J. Kolodziej, et al., "Structure of Ultrathin SiO2/Si(111) Interfaces Studied by Photoelectron Spectroscopy," J. Vac. Sci. Technol. A 17(4), 1250-1257 (1999).
    • (1999) J. Vac. Sci. Technol. A , vol.17 , Issue.4 , pp. 1250-1257
    • Keister, J.W.1    Rowe, J.E.2    Kolodziej, J.J.3
  • 12
    • 45549084079 scopus 로고    scopus 로고
    • NSLS
    • NSLS, "NSLS Beamline U3C Web Page," [http://www.nsls.bnl.gov/ beamlines/beamline.asp?blid=U3C].
    • NSLS Beamline U3C Web Page
  • 13
    • 84860093086 scopus 로고    scopus 로고
    • NSLS
    • NSLS, "NSLS Beamline X8A Web Page," [http://www.nsls.bnl.gov/ beamlines/beamline.asp?blid=X8A].
    • NSLS Beamline X8A Web Page
  • 14
    • 0023325524 scopus 로고
    • Characteristics and Performance of the Los Alamos VUV Beam Line At the NSLS
    • R. J. Bartlett, W. J. Trela, F. D. Michaud, et al., "Characteristics and Performance of the Los Alamos VUV Beam Line At the NSLS," Nucl. Instr. Meth. A266, 199 (1988).
    • (1988) Nucl. Instr. Meth , vol.A266 , pp. 199
    • Bartlett, R.J.1    Trela, W.J.2    Michaud, F.D.3
  • 16
    • 0022063455 scopus 로고
    • First Operation of an Extended Range Grasshopper Monochromator on the Aladdin Storage Ring
    • F. C. Brown, J. P. Stott and S. L. Hulbert, "First Operation of an Extended Range Grasshopper Monochromator on the Aladdin Storage Ring," Nucl. Instr. Meth. A246, 278 (1986).
    • (1986) Nucl. Instr. Meth , vol.A246 , pp. 278
    • Brown, F.C.1    Stott, J.P.2    Hulbert, S.L.3
  • 17
    • 0000571817 scopus 로고
    • Self-Calibration of Semiconductor Photodiodes in the Soft-X-Ray Region
    • M. Krumrey and E. Tegeler, "Self-Calibration of Semiconductor Photodiodes in the Soft-X-Ray Region," Rev. Sci. Instrum. 63(1), 797 (1992).
    • (1992) Rev. Sci. Instrum , vol.63 , Issue.1 , pp. 797
    • Krumrey, M.1    Tegeler, E.2
  • 18
    • 0001183692 scopus 로고
    • Self-Calibration of the Same Silicon Photodiode in the Visible and Soft-X-Ray Ranges
    • M. Krumrey, E. Tegeler, R. Goebel, et al., "Self-Calibration of the Same Silicon Photodiode in the Visible and Soft-X-Ray Ranges," Rev. Sei. Instrum. 66(9), 4736 (1995).
    • (1995) Rev. Sei. Instrum , vol.66 , Issue.9 , pp. 4736
    • Krumrey, M.1    Tegeler, E.2    Goebel, R.3
  • 19
    • 0000910694 scopus 로고    scopus 로고
    • Mean Energy Required to Produce an Electron-Hole Pair in Silicon for Photons of Energies Between 50 and 1500 eV
    • F. Scholze, H. Rabus and G. Ulm, "Mean Energy Required to Produce an Electron-Hole Pair in Silicon for Photons of Energies Between 50 and 1500 eV," Journal of Applied Physics 84(5), 2926-2939 (1998).
    • (1998) Journal of Applied Physics , vol.84 , Issue.5 , pp. 2926-2939
    • Scholze, F.1    Rabus, H.2    Ulm, G.3
  • 20
    • 0004932883 scopus 로고
    • X-Ray Interactions: Photo Absorption, Scattering, Transmission, and Reflection At E = 50-30000 eV, Z = 1-92
    • Atomic Data and Nucl. Data Tables
    • B. L. Henke, E. M. Gullikson and J. C. Davis, "X-Ray Interactions: Photo Absorption, Scattering, Transmission, and Reflection At E = 50-30000 eV, Z = 1-92," Atomic Data and Nucl. Data Tables 54(2), 181 (1993).
    • (1993) , vol.54 , Issue.2 , pp. 181
    • Henke, B.L.1    Gullikson, E.M.2    Davis, J.C.3
  • 22
    • 0019285165 scopus 로고
    • Extreme Ultraviolet Optical Properties of Two Si02 Based Low-Expansion Materials
    • J. Rife and J. Osantowski, "Extreme Ultraviolet Optical Properties of Two Si02 Based Low-Expansion Materials," J.Opt. Soc. Am. 70, 1513 (1980).
    • (1980) J.Opt. Soc. Am , vol.70 , pp. 1513
    • Rife, J.1    Osantowski, J.2
  • 23
    • 9944246768 scopus 로고    scopus 로고
    • Omega Dante Soft X-Ray Power Diagnostic Component Calibration At the National Synchrotron Light Source
    • K. M. Campbell, F. A. Weber, E. L. Dewald, et al., "Omega Dante Soft X-Ray Power Diagnostic Component Calibration At the National Synchrotron Light Source," Rev. Sci. Instrum. 75, 3768 (2004).
    • (2004) Rev. Sci. Instrum , vol.75 , pp. 3768
    • Campbell, K.M.1    Weber, F.A.2    Dewald, E.L.3
  • 24
    • 9944261019 scopus 로고    scopus 로고
    • Dante Soft X-Ray Power Diagnostic for National Ignition Facility
    • E. L. Dewald, K. M. Campbell, R. E. Turner, et al., "Dante Soft X-Ray Power Diagnostic for National Ignition Facility," Rev. Sci. Instrum. 75, 3759 (2004).
    • (2004) Rev. Sci. Instrum , vol.75 , pp. 3759
    • Dewald, E.L.1    Campbell, K.M.2    Turner, R.E.3
  • 25
    • 0000256645 scopus 로고    scopus 로고
    • Target Diagnostic System for the National Ignition Facility
    • R. J. Leeper, G. A. Chandler, G. W. Cooper, et al., "Target Diagnostic System for the National Ignition Facility," Rev. Sci. Instrum. 68, 868 (1997).
    • (1997) Rev. Sci. Instrum , vol.68 , pp. 868
    • Leeper, R.J.1    Chandler, G.A.2    Cooper, G.W.3
  • 26
    • 6644221258 scopus 로고    scopus 로고
    • Development and Characterization of a Z-Pinch-Driven Hohlraum High-Yield Inertial Confinement Fusion Target Concept
    • M. E. Cuneo, R. A. Vesey, J. L. Porter, et al., "Development and Characterization of a Z-Pinch-Driven Hohlraum High-Yield Inertial Confinement Fusion Target Concept," Physics of Plasmas 8(5), 2257-2267 (2001).
    • (2001) Physics of Plasmas , vol.8 , Issue.5 , pp. 2257-2267
    • Cuneo, M.E.1    Vesey, R.A.2    Porter, J.L.3
  • 27
    • 0000559607 scopus 로고    scopus 로고
    • Soft X-Ray Measurements of Z-Pinch-Driven Vacuum Hohlraums
    • K. L. Baker, J. L. Porter, L. E. Ruggles, et al., "Soft X-Ray Measurements of Z-Pinch-Driven Vacuum Hohlraums," Appl. Phys. Lett. 75(6), 775-777 (1999).
    • (1999) Appl. Phys. Lett , vol.75 , Issue.6 , pp. 775-777
    • Baker, K.L.1    Porter, J.L.2    Ruggles, L.E.3
  • 28
    • 41349122381 scopus 로고    scopus 로고
    • X-Ray Absorption Spectroscopy Measurements of Thin Foil Heating by Z-Pinch Radiation
    • J. J. MacFarlane, J. E. Bailey, G. A. Chandler, et al., "X-Ray Absorption Spectroscopy Measurements of Thin Foil Heating by Z-Pinch Radiation," Phys. Rev. E 66, 046416 (2002).
    • (2002) Phys. Rev. E , vol.66 , pp. 046416
    • MacFarlane, J.J.1    Bailey, J.E.2    Chandler, G.A.3
  • 29
    • 0001042868 scopus 로고    scopus 로고
    • Filtered X-Ray Diode Diagnostics Fielded on the Z Accelerator for Source Power Measurements
    • G. A. Chandler, C. Deeney, M. Cuneo, et al., "Filtered X-Ray Diode Diagnostics Fielded on the Z Accelerator for Source Power Measurements," Rev. Sci. Instrum. 70(1), 561-565 (1999).
    • (1999) Rev. Sci. Instrum , vol.70 , Issue.1 , pp. 561-565
    • Chandler, G.A.1    Deeney, C.2    Cuneo, M.3
  • 30
    • 33750496634 scopus 로고    scopus 로고
    • Soft X-Ray Power Diagnostic Improvements At the Omega Laser Facility
    • Rev. Sei. Instrum. 77, 10E518
    • C. Sorce, J. Schein, F. Weber, et al., "Soft X-Ray Power Diagnostic Improvements At the Omega Laser Facility," Rev. Sei. Instrum. 77, 10E518 (2006).
    • (2006)
    • Sorce, C.1    Schein, J.2    Weber, F.3
  • 31
    • 33750494994 scopus 로고    scopus 로고
    • Energy Dependent Sensitivity of MicroChannel Plate Detectors
    • Rev. Sci. Instrum. 77, 10E323
    • G. A. Rochau, J. E. Bailey, G. A. Chandler, et al., "Energy Dependent Sensitivity of MicroChannel Plate Detectors," Rev. Sci. Instrum. 77, 10E323 (2006).
    • (2006)
    • Rochau, G.A.1    Bailey, J.E.2    Chandler, G.A.3
  • 32
    • 0028757447 scopus 로고    scopus 로고
    • L. R. Canfield, R. Vest, T. N. Woods, et al., Silicon Photodiodes with Integrated Thin Film Filters for Selective Bandpasses in the Extreme Ultraviolet, SPIE Conference Ultraviolet Technology V 2282, 31-38 (1994).
    • L. R. Canfield, R. Vest, T. N. Woods, et al., "Silicon Photodiodes with Integrated Thin Film Filters for Selective Bandpasses in the Extreme Ultraviolet," SPIE Conference "Ultraviolet Technology V" 2282, 31-38 (1994).
  • 35
    • 0032621318 scopus 로고    scopus 로고
    • Ultraviolet Radiometry with Synchrotron Radiation and Cryogentic Radiometry
    • P. S. Shaw, K. R. Lykke, R. Gupta, et al., "Ultraviolet Radiometry with Synchrotron Radiation and Cryogentic Radiometry," Applied Optics 38(1), 18-28 (1999).
    • (1999) Applied Optics , vol.38 , Issue.1 , pp. 18-28
    • Shaw, P.S.1    Lykke, K.R.2    Gupta, R.3
  • 36
    • 0001443748 scopus 로고    scopus 로고
    • Synchrotron-Radiation-Operated Cryogenic Electrical-Substitution Radiometer As the High-Accuracy Primary Detector Standard in the Ultraviolet, Vacuum-Ultraviolet, and Soft-X-Ray Spectral Ranges
    • H. Rabus, V. Persch and G. Ulm, "Synchrotron-Radiation-Operated Cryogenic Electrical-Substitution Radiometer As the High-Accuracy Primary Detector Standard in the Ultraviolet, Vacuum-Ultraviolet, and Soft-X-Ray Spectral Ranges," Applied Optics 36(22), 5421-5440 (1997).
    • (1997) Applied Optics , vol.36 , Issue.22 , pp. 5421-5440
    • Rabus, H.1    Persch, V.2    Ulm, G.3
  • 37
    • 0037226007 scopus 로고    scopus 로고
    • High-Accuracy Radiometry in the EUV Range At the PTB Soft X-Ray Beamline
    • F. Scholze, J. Tümmler and G. Ulm, "High-Accuracy Radiometry in the EUV Range At the PTB Soft X-Ray Beamline," Metrologia 40, S224-S228 (2003).
    • (2003) Metrologia , vol.40
    • Scholze, F.1    Tümmler, J.2    Ulm, G.3
  • 38
    • 0036378973 scopus 로고    scopus 로고
    • High-Accuracy Detector Calibration for EUV Metrology At PTB
    • Emerging Lithographic Technologies VI
    • F. Scholze, G. Brandt, P. Müller, et al., "High-Accuracy Detector Calibration for EUV Metrology At PTB," SPIE conference "Emerging Lithographic Technologies VI" 4688, 680-689 (2002).
    • (2002) SPIE conference , vol.4688 , pp. 680-689
    • Scholze, F.1    Brandt, G.2    Müller, P.3
  • 39
    • 84975635026 scopus 로고
    • Stability and Quantum Efficiency Performance of Silicon Photodiode Detectors in the Far Ultraviolet
    • L. R. Canfield, J. Kerner and R. Korde, "Stability and Quantum Efficiency Performance of Silicon Photodiode Detectors in the Far Ultraviolet," Applied Optics 28(18), 3940-3943 (1989).
    • (1989) Applied Optics , vol.28 , Issue.18 , pp. 3940-3943
    • Canfield, L.R.1    Kerner, J.2    Korde, R.3
  • 40
    • 0030141933 scopus 로고    scopus 로고
    • Detector Calibration in the Wavelength Region 10 nm to 100 nm Based on a Windowless Rare Gas Ionization Chamber
    • T. Saito and H. Onuki, "Detector Calibration in the Wavelength Region 10 nm to 100 nm Based on a Windowless Rare Gas Ionization Chamber," Metrologia 32, 525-529 (1996).
    • (1996) Metrologia , vol.32 , pp. 525-529
    • Saito, T.1    Onuki, H.2
  • 41
    • 0002734439 scopus 로고
    • Accurate Determination of the Ionization Energy in Semiconductor Detectors
    • R. H. Pehl, F. S. Goulding, D. A. Landis, et al., "Accurate Determination of the Ionization Energy in Semiconductor Detectors," Nuclear Instruments and Methods 59, 45-55 (1968).
    • (1968) Nuclear Instruments and Methods , vol.59 , pp. 45-55
    • Pehl, R.H.1    Goulding, F.S.2    Landis, D.A.3
  • 42
    • 33746653044 scopus 로고    scopus 로고
    • Comparison of Ultrathin SiO2/Si(100) and SiO2/Si(111) Interface From Soft X-Ray Photoelectron Spectroscopy
    • M. D. Ulrich, J. E. Rowe, J. W. Keister, et al., "Comparison of Ultrathin SiO2/Si(100) and SiO2/Si(111) Interface From Soft X-Ray Photoelectron Spectroscopy," J. Vac. Sci. Technol. B 24(4), 2132-2137 (2006).
    • (2006) J. Vac. Sci. Technol. B , vol.24 , Issue.4 , pp. 2132-2137
    • Ulrich, M.D.1    Rowe, J.E.2    Keister, J.W.3
  • 44
    • 0030146528 scopus 로고
    • The Radiation Entrance Window of Pn Junction Detectors
    • R. Hartmann, P. Lechner, L. Strüder, et al., "The Radiation Entrance Window of Pn Junction Detectors," Metrologia 32, 491-494 (1995).
    • (1995) Metrologia , vol.32 , pp. 491-494
    • Hartmann, R.1    Lechner, P.2    Strüder, L.3
  • 45
    • 0141890657 scopus 로고    scopus 로고
    • Irradiation Stability of Silicon Photodiodes for Extreme-Ultraviolet Radiation
    • F. Scholze, R. Klein and T. Bock, "Irradiation Stability of Silicon Photodiodes for Extreme-Ultraviolet Radiation," Applied Optics 42(28), 5621-5626 (2003).
    • (2003) Applied Optics , vol.42 , Issue.28 , pp. 5621-5626
    • Scholze, F.1    Klein, R.2    Bock, T.3


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