High-accuracy detector calibration for EUV metrology at PTB

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4688, Issue 2, 2002, Pages 680-689

  Scholze, Frank ^a   Brandt, Guido ^a   Müller, Peter ^a   Meyer, Bernd ^a   Scholz, Frank ^a   Tümmler, Johannes ^a   Vogel, Katrin ^a   Ulm, Gerhard ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

Extreme UV; High accuracy detector calibration; Irradiation stability; Radiometry

Indexed keywords

MAGNETS; PHOTODIODES; RADIOMETERS; SPECTRUM ANALYSIS; SPURIOUS SIGNAL NOISE; STORAGE RINGS; SYNCHROTRON RADIATION;

EXTREME ULTRAVIOLET (EUV) LITHOGRAPHY;

PHOTOLITHOGRAPHY;

EID: 0036378973     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.472342     Document Type: Article

References (11)

1. B. Wende, "Radiometry with synchrotron radiation, " Metrologia 32, 419-424 (1996)
2. G. Ulm, and B. Wende, "Radiometry laboratory of Physikalisch-Technische Bundesanstalt at BESSY, " Rev. Sci. Instrum. 66, 2244-2247 (1995)
3. G. Ulm, B. Beckhoff, R. Klein, M. Krumrey, H. Rabus, and R. Thornagel, "The PTB radiometry laboratory at the BESSY II electron storage ring, " Proc. SPIE 3444, 610-621 (1998)
4. H. Rabus, V. Persch, and G. Ulm, "Synchrotron-Radiation Operated Cryogenic Electrical-Substitution Radiometer as High-Accuracy Primary Detector Standard in the Ultraviolet, Vacuum Ultraviolet and Soft X-Ray Spectral Ranges, " Appl. Optics 36, 5421-5440 (1997)
5. H. Rabus, F. Scholze, R. Thornagel, and G. Ulm, "Detector calibration at the PTB radiometry laboratory at BESSY, " Nucl. Instr. and Meth. A377, 209-216 (1996)
6. F. Scholze, H. Rabus, G. Ulm, "Spectral responsivity of silicon photodiodes: High-accuracy measurements and improved self calibration in the soft X-ray spectral range, " Proc. SPIE 2808, 534-543 (1996)
7. F. Scholze, H. Rabus, and G. Ulm, "Mean energy required to produce an electron-hole pair in silicon for photons of energies between 50 and 1500 eV, " J. Appl. Phys. 84, 2926-2939 (1998)
8. E.M. Gullikson, R. Korde, L.R. Canfield, and R.E. Vest, "Stable silicon photodiodes for absolute intensity measurements in the VUV and soft X-ray regions, " J. Electron Spectrosc. Rel. Phenom. 80, 313-316 (1996)
9. R. Korde, J.S. Cable, and L.R. Canfield, "One gigarad passivating nitrided oxides for 100% internal quantum efficiency silicon photodiodes, " IEEE Trans. Nucl. Sci. 40, 1655-1659 (1993)
10. F. Scholze, B. Beckhoff, G.Brandt, R. Fliegauf, R. Klein, B. Meyer, D. Rost, D. Schmitz, and M. Veldkamp, "The new PTB-beamlines for high-accuracy EUV reflectometry at BESSY IL" Proc. SPIE 4146, 72-82 (2000)
11. F. Scholze, B. Beckhoff, G. Brandt, R. Fliegauf, A. Gottwald, R. Klein, B. Meyer, U. Schwarz, R. Thornagel, J. Tümmler, K. Vogel, J. Weser, and G. Ulm, "High-Accuracy EUV Metrology of PTB Using Synchrotron Radiation, " Proc. SPIE 4344, 402-413 (2001)