Ultraviolet radiometry with synchrotron radiation and cryogenic radiometry

Applied Optics

Volumn 38, Issue 1, 1999, Pages 18-28

  Shaw, Ping Shine ^a   Lykke, Keith R ^a   Gupta, Rajeev ^a   O’brian, Thomas R ^a   Arp, Uwe ^a   White, Hunter H ^a   Lucatorto, Thomas B ^a   Dehmer, Joseph L ^a   Parr, Albert C ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYOGENICS; OPTICAL MATERIALS; OPTICAL VARIABLES MEASUREMENT; QUANTUM OPTICS; RADIATION DAMAGE; SPECTRUM ANALYSIS; SYNCHROTRON RADIATION; ULTRAVIOLET INSTRUMENTS; ULTRAVIOLET RADIATION;

CRYOGENIC RADIOMETRY; INTERNAL QUANTUM EFFICIENCY; RADIOMETRIC MEASUREMENTS; SPATIAL RESPONSIVITY MAPPING; SPECTRORADIOMETRIC CALIBRATION; SPECTROREFLECTANCE; ULTRAVIOLET RADIOMETRY;

RADIOMETRY;

EID: 0032621318     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.38.000018     Document Type: Article

References (34)

1. D. C. Ginnings and M. L. Reilly, “Calorimetric measurement of thermodynamic temperatures above 0 °C using total black-body radiation,” in Temperature: Its Measurement and Control in Science and Industry, H. H. Plumb, ed. (Instrument Society of America, Pittsburgh, Pa., 1972), Vol. 4, Part 1, pp. 339-348.
2. C. R. Yokley, “Long wave infrared testing at NBS,” in Appli-cations of Optical Metrology: Techniques and Measurements II, R. C. Harney, ed., Proc. SPIE 416, 2-8 (1983).
3. T. J. Quinn and J. E. Martin, “A radiometric determination of the Stefan-Boltzmann constant,” in Precision Measurement and Fundamental Constants II, Natl. Bur. Stand. (U.S.) Spec. Publ. 617, 291-297 (1984).
4. T. J. Quinn and J. E. Martin, “A radiometric determination of the Stefan-Boltzmann constant and thermodynamic temper-ature between —40 °C and +100 °C,” Philos. Trans. R. Soc. London Ser. A 316, 85-189 (1985).
5. J. E. Martin, N. P. Fox, and P. G. Key, “A cryogenic radiometer for absolute radiometric measurements,” Metrologia 21, 147-155 (1985).
6. T. R. Gentile, J. M. Houston, and C. L. Cromer, “Realization of a scale of absolute spectral response using the National Institute of Standards and Technology high-accuracy cryogenic radiometer,” Appl. Opt. 35, 4392-4403 (1996).
7. T. R. Gentile, J. M. Houston, J. E. Hardis, C. L. Cromer, and A. C. Parr, “National Institute of Standards and Technology high-accuracy cryogenic radiometer,” Appl. Opt. 35, 1056-1068 (1996).
8. T. C. Larason, S. S. Bruce, and C. L. Cromer, “The NIST high accuracy scale for absolute spectral response from 406 nm to 920 nm,” J. Res. Natl. Inst. Stand. 101, 133-140 (1996).
9. T. C. Larason, S. S. Bruce, and A. C. Parr, “NIST measurement services: spectroradiometric detector measurements: Parts I and II—ultraviolet and visible to near infrared detectors,” Natl. Inst. Stand. Technol. (U.S.) Spec. Publ. 250-41 (1997).
10. G. Margaritondo, Introduction to Synchrotron Radiation (Oxford U. Press, New York, 1988), Chaps. 1 and 2.
11. D. L. Ederer, E. B. Saloman, S. C. Ebner, and R. P. Madden, “The use of synchrotron radiation as an absolute source of VUV radiation,” J. Res. Natl. Inst. Stand. Technol. 79 A 761-774 (1975).
12. M. L. Fürst, R. M. Graves, L. R. Canfield, and R. E. Vest, “Radiometry at the NIST SURF II storage ring facility,” Rev. Sci. Instrum. 66, 2257-2259 (1995).
13. J. Schwinger, “On the classical radiation of accelerated elec-trons,” Phys. Rev. 75, 1912-1925 (1949).
14. B. Wende, “Radiometry with synchrotron radiation,” Metrolo-gia 32, 419-423 (1996).
15. G. Ulm, and B. Wende, “The radiometry laboratory of PTB at BESSY,” Rev. Sci. Instrum. 66, 2244-2247 (1995).
16. H. Rabus, F. Scholze, R. Thornagel, and G. Ulm, “Detector calibration at the PTB radiometry laboratory at BESSY,” Nucl. Instrum. Methods A 377, 209-216 (1996).
17. L. R. Canfield, “New far UV detector calibration facility at the National Bureau of Standards,” Appl. Opt. 26, 3831-3837 (1987).
18. L. R. Canfield and N. Swanson, “Far ultraviolet detector standards,” J. Res. Natl. Bur. Stand. 92, 97-112 (1987).
19. R. E. Vest, L. R. Canfield, M. L. Furst, R. P. Madden, and N. Swanson, “Dual grating monochromator for detector calibrations using synchrotron radiation as an absolute source at NIST,” Nucl. Instrum. Methods A 347, 291-294 (1994).
20. A. Lau-Frambs, U. Kroth, H. Rabus, E. Tegeler, G. Ulm, and B. Wende, “First results with the new PTB cryogenic radiometer for the vacuum ultraviolet spectral range,” Metrologia 32, 571-574 (1995/1996).
21. H. Rabus, V. Persch, and G. Ulm, “Synchrotron-radiationoperated cryogenic electric-substitution radiometer as the high-accuracy primary detector standard in the ultraviolet, vacuum-ultraviolet, and soft-x-ray spectral ranges,” Appl. Opt. 36, 5421-5440 (1997).
22. P. S. Shaw, K. R. Lykke, R. Gupta, T. R. O’brian, U. Arp, H. H. White, T. B. Lucatorto, J. L. Dehmer, and A. C. Parr, “New UV radiometry beamline at the Synchrotron Ultraviolet Radiation Facility at NIST,” Metrologia 35 (1998).
23. J. Geist, E. F. Zalewski, and A. R. Schaefer, “Spectral response self-calibration and interpolation of silicon photodiodes,” Appl. Opt. 19, 3795-3799 (1980).
24. J. Geist, D. Chandler-Horowitz, A. M. Robinson, and C. R. James, “Numerical modeling of silicon photodiodes for high accuracy applications, Parts I, II, and III,” J. Res. Natl. Inst. Stand. Technol. 96, 463-492 (1992).
25. D. L. Ederer, B. E. Cole, and J. B. West, “A high-throughput 2-m normal incidence monochromator for SURF II,” Nucl. Instrum. Methods 172, 185-190 (1980).
26. L. R. Hughey, “Improved resolution and flexibility of the SURF II high-throughput 2-m normal incidence monochromator,” Nucl. Instrum. Methods A 347, 294-298 (1994).
27. L. P. Boivin and K. Gibb, “Monochromator-based cryogenic radiometry at the NRC,” Metrologia 32, 565-570 (1995/1996).
28. B. N. Taylor and C. E. Kuyatt, “Guidelines for evaluating and expressing the uncertainty of NIST measurement results,” NIST Tech. Note 1297, 2nd ed. (National Institute of Standards and Technology, Gaithersburg, Md., 1994).
29. T. Saito, K. Katori, M. Nishi, and H. Onuki, “Spectral quantum efficiencies of semiconductor photodiodes in the far ultraviolet region,” Rev. Sci. Instrum. 60, 2303-2306 (1989).
30. R. Korde and J. Geist, “Quantum efficiency stability of silicon photodiodes,” Appl. Opt. 26, 5284-5290 (1987).
31. L. Fu and J. Fischer, “Characterization of photodiodes in the UV and visible spectral region based on cryogenic radiometry,” Metrologia 30, 297-303 (1993).
32. C. L. Cromer, T. B. Lucatorto, T. R. O’brian, and M. Walhout, “Improved dose metrology in optical lithography,” Solid State Technol. 39, 75 (1996).
33. K. Solt, H. Melchior, U. Kroth, P. Kuschnerus, V. Persch, H. Rabus, M. Richter, and G. Ulm, “PtSi-n-Si Schottky-barrier photodetectors with stable spectral responsivity in the 120 nm to 250 nm spectral range,” Appl. Phys. Lett. 69, 3662-3664 (1996).
34. T. R. O’brian, “SURF III: the next generation radiometric storage ring facility at NIST,” in Ultraviolet Atmospheric and Space Remote Sensing: Methods and Instrumentation, R. E. Huffman and C. G. Stergis, eds., Proc. SPIE 2831, 222-228 (1996).