Mechanical and tribological properties of epitaxial cubic boron nitride thin films grown on diamond

Advanced Engineering Materials

Volumn 10, Issue 5, 2008, Pages 482-487

  Deyneka Dupriez, Nataliya ^a   Herr, Ulrich ^a   Fecht, Hans Jörg ^a   Zhang, Xing Wang ^b   Yin, Hong ^a   Boyen, Hans Gerd ^c   Ziemann, Paul ^a  

^a UNIVERSITY OF ULM   (Germany)

^b INSTITUTE OF SEMICONDUCTORS   (China)

^c HASSELT UNIVERSITY   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; BORON; BORON NITRIDE; COMPUTER NETWORKS; CUBIC BORON NITRIDE; DIAMONDS; EPITAXIAL FILMS; IMAGING TECHNIQUES; ION BEAM ASSISTED DEPOSITION; ION BOMBARDMENT; LITHOGRAPHY; MECHANICAL PROPERTIES; MICROSCOPIC EXAMINATION; MOLECULAR BEAM EPITAXY; NITRIDES; NONMETALS; SCANNING PROBE MICROSCOPY; SILICON; THICK FILMS; THIN FILMS; VAPOR DEPOSITION;

(PL) PROPERTIES; APPLIED (CO); ATOMIC FORCE (AF); BORON NITRIDE THIN FILMS; DIAMOND SUBSTRATES; EPITAXIALLY GROWN; FRICTION BEHAVIORS; INDENTER; ION-BEAM-ASSISTED DEPOSITION (IBAD); ROOT MEAN SQUARE ROUGHNESS (RMS); SAMPLE QUALITY; SILICON (111) SUBSTRATES; STRETCH TESTS; TRIBOLOGICAL PROPERTIES;

DIAMOND FILMS;

EID: 45149099270     PISSN: 14381656     EISSN: 15272648     Source Type: Journal    
DOI: 10.1002/adem.200700305     Document Type: Article

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