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Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 17, Issue 6, 1999, Pages 3351-3357

Nanoscratch characterization of dual-ion-beam deposited C-doped boron nitride films

(3) Chan, K F a Ong, C W a Choy, C L a

a HONG KONG POLYTECHNIC UNIVERSITY (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0033441636 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.582064 Document Type: Article

Times cited : (3)

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