Origin and effect of impurity incorporation in plasma-enhanced ZrO2 deposition

Journal of Applied Physics

Volumn 93, Issue 11, 2003, Pages 9345-9351

  Cho, Byeong Ok ^a   Lao, Sandy X ^a   Chang, Jane P ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMISORPTION; ELECTRON SPECTROSCOPY; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HYDROGEN BONDS; MASS SPECTROMETRY; PERMITTIVITY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; X RAY PHOTOELECTRON SPECTROSCOPY;

IMPURITY INCORPORATION;

ZIRCONIUM COMPOUNDS;

EID: 0038650822     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1572193     Document Type: Article

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