Comparison of thermoreflectance and scanning thermal microscopy for microelectronic device temperature variation imaging: Calibration and resolution issues

Microelectronics Reliability

Volumn 48, Issue 2, 2008, Pages 204-211

  Grauby, Stéphane ^a   Salhi, Amine ^a   Patino Lopez, Luis David ^a   Claeys, Wilfrid ^a   Charlot, Benoît ^b   Dilhaire, Stefan ^a  

^a UNIVERSITÉ DE BORDEAUX   (France)

^b TIMA LABORATORY   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMAGNETIC WAVE DIFFRACTION; IMAGE RESOLUTION; INFRARED IMAGING; SCANNING PROBE MICROSCOPY; THERMOANALYSIS;

MICROELECTRONIC DEVICES; SCANNING THERMAL MICROSCOPE (STHM); TEMPERATURE VARIATIONS; THERMOREFLECTANCE;

MICROELECTRONICS;

EID: 44249119834     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.microrel.2007.04.008     Document Type: Article

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