Dynamical behavior of the scanning thermal microscope (SThM) thermal resistive probe studied using Si/SiGe microcoolers

Superlattices and Microstructures

Volumn 38, Issue 1, 2005, Pages 69-75

  Ezzahri, Y ^a   Lopez, L D Patiño ^a   Chapuis, O ^b   Dilhaire, S ^a   Grauby, S ^a   Claeys, W ^a   Volz, S ^b  

^a UNIVERSITÉ DE BORDEAUX   (France)

^b ECOLE CENTRALE PARIS   (France)

Author keywords

Microcooler; SThM technique; SThM thermal probe time response; Tip sample contact resistance; Wollaston wire

Indexed keywords

FREQUENCIES; HEAT RESISTANCE; SCANNING ELECTRON MICROSCOPY; TEMPERATURE DISTRIBUTION; TRANSFER FUNCTIONS; WIRE;

MICROCOOLER; STHM TECHNIQUE; STHM THERMAL PROBE TIME RESPONSE; TIP-SAMPLE CONTACT RESISTANCE; WOLLASTON WIRE;

SILICON COMPOUNDS;

EID: 20644453752     PISSN: 07496036     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.spmi.2005.04.005     Document Type: Article

References (15)

1. R.B. Dinwiddie, R.J. Pylkki, and P.E. West Thermal conductivity contrast imaging with a scanning thermal microscope T.W. Tong Thermal Conductivity vol. 22 1994 Technomic Publishing Co. Lancaster 668 677
2. A. Majumdar Annu. Rev. Mater. Sci. 29 1999 505 585
3. E. Gmelin, R. Fischer, and R. Stitzinger Thermochim. Acta 310 1998 1 17
4. A.I. Buzin, P. Kamasa, M. Pyda, and B. Wunderlich Thermochim. Acta 381 2002 9 18
5. S. Lefévre, S. Volz, J.B. Saulnier, C. Fuentes, and N. Trannoy Rev. Sci. Instrum. 74 2003 2418 2423
6. Y. Zhang, G. Zeng, R. Singh, J. Christofferson, E. Croke, J.E. Bowers, A. Shakouri, 21st International Conference on Thermoelectrics, 25-29 August 2002, Long Beach USA, 2002, pp. 329-332
7. Y. Zhang, D. Vashaee, J. Christofferson, A. Shakouri, G. Zeng, C. Labounty, J. Piprek, E. Croke, International Mechanical Engineering Congress and Exposition, 16-21 November 2003, Washington, DC, 2003
8. X. Fan, G. Zeng, C. Labounty, J.E. Bowers, E. Croke, C.C. Ahn, S. Huxtable, A. Majumdar, and A. Shakouri Appl. Phys. Lett. 78 2001 1580 1582
9. A. Fitting, J. Christofferson, A. Shakouri, X. Fan, G. Zeng, C. Labounty, J.E. Bowers, E.T. Croke, ASME Heat Transfer Division Conference: 2001 IMECE
10. V. Quintard, G. Deboy, S. Dilhaire, D. Lewis, T. Phan, and W. Claeys Microelectron. Eng. 31 1996 291 298
11. S. Dilhaire, Y. Ezzahri, S. Grauby, W. Claeys, J. Christofferson, Y. Zhang, A. Shakouri, 23rd International Conference on Thermoelectrics, 17-21 August 2003, La Grande Motte, France, 2003, pp. 519-523
12. S. Gomès, N. Trannoy, and P. Grossel Meas. Sci. Technol. 10 1999 805 811
13. D. Maillet, S. André, J.C. Batsale, A. Degiovanni, and C. Moyne Thermal Quadrupoles: Solving the Heat Equation through Integral Transforms 2000 John Wiley & Sons
14. L.d. Patiño-Lopez, Ph.D. Thesis, Université Bordeaux 1, 2004
15. ®