Stability of transparent conducting oxide films for use at high temperatures

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 17, Issue 4, 1999, Pages 1822-1826

  Minami, Tadatsugu ^a   Miyata, Toshihiro ^a   Yamamoto, Takashi ^a  

^a KANAZAWA INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BINARY COMPOUNDS; ELECTRICAL PROPERTY; GA CONTENT; GAS ATMOSPHERE; HIGH TEMPERATURE; METAL ELEMENTS; MULTI-COMPONENT OXIDES; SB FILMS; TERNARY COMPOUNDS; TRANSPARENT CONDUCTING OXIDE FILMS; VARIOUS ATMOSPHERE; ZNO; ZNO:AL FILMS;

CHEMICAL STABILITY; CONDUCTIVE FILMS; ELECTRIC PROPERTIES; GALLIUM; OXIDE FILMS; TERNARY ALLOYS; TERNARY SYSTEMS; TIN; ZINC; ZINC OXIDE;

ATMOSPHERIC TEMPERATURE;

EID: 27844510683     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581897     Document Type: Conference Paper

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