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Volumn 37, Issue 1, 2006, Pages 470-473
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Late-news poster: New techniques for producing AZO thin films suitable for ITO transparent electrode applications in LCDs
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Author keywords
[No Author keywords available]
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Indexed keywords
DEPOSITION;
ELECTRIC CURRENTS;
ELECTRODES;
HYDROGEN;
LIQUID CRYSTAL DISPLAYS;
MAGNETRON SPUTTERING;
DIRECT CURRENT MAGNETRON SPUTTERING DEPOSITIONS;
MOISTURE-RESISTANT;
RADIO FREQUENCY POWER;
THIN FILMS;
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EID: 34547503205
PISSN: 0097966X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1889/1.2451405 Document Type: Conference Paper |
Times cited : (6)
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References (18)
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