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Volumn 254, Issue 17, 2008, Pages 5487-5491

Gadolinium oxide high-k gate dielectrics prepared by anodic oxidation

Author keywords

Anodic oxidation; Dielectric constant; Equivalent oxide thickness; Gadolinium oxide

Indexed keywords

ANODIC OXIDATION; FILM THICKNESS; GADOLINIUM COMPOUNDS; PERMITTIVITY; POLYCRYSTALLINE MATERIALS; THIN FILMS;

EQUIVALENT OXIDE THICKNESS; GADOLINIUM OXIDE; POLY-CRYSTALLINE STRUCTURE;

GATE DIELECTRICS;

EID: 43849102708 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/j.apsusc.2008.02.115 Document Type: Article

Times cited : (12)

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