Preparation of sol-gel derived titanium oxide thin films using vacuum ultraviolet irradiation with a xenon excimer lamp

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 43, Issue 9 A, 2004, Pages 6315-6318

  Naganuma, Yasuhiro ^a   Tanaka, Satomi ^a   Kato, Chihiro ^a  

^a KANAGAWA ACADEMY OF SCIENCE AND TECHNOLOGY   (Japan)

Author keywords

Excimer lamp; Sol gel; Thin film; Titanium oxide; Vacuum ultraviolet

Indexed keywords

DISTILLATION; HEAT TREATMENT; LIGHT SOURCES; REDOX REACTIONS; SOL-GELS; TITANIUM OXIDES; ULTRAVIOLET RADIATION; VACUUM;

EXCIMER LAMPS; OXYGEN MOLECULES; POLYMER SHEETS; VACCUM ULTRAVIOLET;

THIN FILMS;

EID: 9144245859     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.43.6315     Document Type: Article

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