Excellent frequency dispersion of thin gadolinium oxide high- k gate dielectrics

Applied Physics Letters

Volumn 87, Issue 26, 2005, Pages 1-3

  Pan, Tung Ming ^a   Liao, Chao Sung ^a   Hsu, Hui Hsin ^a   Chen, Chun Lin ^a   Lee, Jian Der ^a   Wang, Kuan Ti ^a   Wang, Jer Chyi ^b  

^a CHANG GUNG UNIVERSITY   (Taiwan)

^b NANYA TECHNOLOGY CORPORATION   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC MATERIALS; ELECTRIC BREAKDOWN; HYSTERESIS; LEAKAGE CURRENTS; PASSIVATION; SPUTTERING;

ELECTRICAL PROPERTIES; FREQUENCY DISPERSION; GADOLINIUM OXIDE (GD2 O3) GATE DIELECTRICS; REACTIVE RF SPUTTERING;

GADOLINIUM COMPOUNDS;

EID: 29744454327     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2152107     Document Type: Article

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