Modern methods of highly precise figuring and polishing

Novel Optical Technologies: Proceedings of the 3rd DGG Symposium, Held at the 79th Annual Meeting of the Deutsche Glastechnische Gesellschaft (DGG)

Volumn 78, Issue , 2005, Pages 111-116

  Schindler, Axel ^a   Hänsel, Thomas ^a   Frost, Frank ^a   Böhm, Georg ^a   Frank, Wilfried ^a   Nickel, Andreas ^a   Arnold, Thomas ^a   Schwabe, Reinhard ^b   Gürtler, Steffen ^c   Görsch, Stephan ^c   Rauschenbach, Bernd ^a  

^a LEIBNIZ INSTITUTE OF SURFACE ENGINEERING IOM   (Germany)

^b Nano Technologie Leipzig GmbH   (Germany)

^c OPTEG GmbH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 43449112987     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (22)

1. S. D. Jacobs, Innovations in Optics Manufacturing, Technical Digest: Frontiers in Optics 2004, 88th OSA Annual Meeting, October 10-14, 2004, Rochester, New York, USA, (Optical Society of America, Washington DC, 2004).
2. S. R. Wilson, D. W. Reicher, J. R. McNeil, Proc. of the SPIE 966, 74 (1988).
3. T. W. Drueding et al., Opt. Eng. 34, 3565 (1995).
4. A. Schindler et al.,: Ion beam and plasma jet etching for optical component fabrication, Proc. of the SPIE 4440, 217 (2001)
5. A. Schindler et al.,: Ion Beam Finishing Technology for High Precision Optics Production, in Optical Fabrication & Testing, OSA Technical Digest (Optical Society of America, Washington DC, 2001), 64.
6. U. Dinger et al.,: Fabrication and metrology of diffraction limited soft x-ray optics for the EUV microlithography Proc. of the SPIE 5193,18 (2004).
7. T. Hänsel et al.,: Ion beam figuring surface finishing of x-ray and synchrotron beam line optics using stitching interferometry for the surface topology measurement, Technical Digest: Frontiers in Optics 2004, 88th OSA Annual Meeting, October 10-14, 2004, Rochester, New York, USA, (Optical Society of America, Washington DC, 2004).
8. L. F. Johnson, K. A. Ingersoll, Appl. Opt. 22,1165 (1983).
9. R. Fechner et al., in Precision Science and Technology for Perfect Surfaces, Eds. Y. Furukawa, Y. Mori, T. Kataoka (The Japan Society for Precision Engineering, Tokyo 1999), 249 (1999).
10. M. WiBing, M. Batzill, K. J. Snowdon, Nanotechnology 8, 40 (1997)
11. K. Kimura et al., Nucl. Instrum. Methods B 148,149 (1999).
12. L.P. Allen et al., J. Electron. Mater. 30, 829 (2001).
13. D. B. Fenner et al: Proc. of the SPIE 4468,17(2001).
14. F. Frost, A. Schindler, F. Bigl, Appl. Phys. A 66, 663 (1998).
15. 2 thin films by low-energy ion beam etching, J. Vac. Sci. Technol. A 17, 793 (1999).
16. A. Hirata, H. Tokura, M. Yoshikawa, Thin Solid Films 212,43 (1992)
17. S. Kiyohara et al., Nucl. Instrum. Methods B 121,191 (1997).
18. F. Frost et al.,: Ion beam assisted smoothing of optical surfaces Appl. Phys. A 78, 651 (2004).
19. A. Schindler et al.,: Finishing procedure for high-performance synchrotron optics, Proc. of the SPIE 5180, 64 (2003).
20. F. Frost et al., Thin Solid Films 459,100 (2004).
21. G. Böhm et al., Plasma Jet Chemical Etching - a Tool for the Figuring of Optical Precision Aspheres, in Precision Science and Technology for Perfect Surfaces, Eds. Y. Furukawa, Y. Mori, T. Kataoka (The Japan Society for Precision Engineering, Tokyo 1999), 231 (1999).
22. T. Arnold, G. Böhm, A. Schindler, J. Vac. Sci. Technol. A 19, 2586 (2001).