SCOPUS 정보 검색 플랫폼

Volumn , Issue , 2002, Pages 64-66

Ion Beam Finishing Technology for High Precision Optics Production

(11) Schindler, A a Hansel T a Frost, F a Fechner, R a Seidenkranz, G b Nickel, A a Thomas, H J d Neumann, H a Hirsch, D a Schwabe, R b Barucki, K c

a LEIBNIZ INSTITUTE OF SURFACE ENGINEERING IOM (Germany)

b Nanotechnologie Leipzig GmbH NTGL (Germany)

c Innovative Oberflächentechnologien GmbH (Germany)

d NONE

Author keywords

[No Author keywords available]

Indexed keywords

GAUSSIAN BEAMS; IONS; SOFTWARE PROTOTYPING;

CUSTOMIZED SOLUTIONS; DWELL TIME; FINISHING TECHNOLOGY; HIGH-PRECISION OPTICS; ION BEAM ETCHING; ION BEAM FIGURING; LEIPZIG; PRODUCTION EQUIPMENTS; PRODUCTION REQUIREMENTS; TIME ALGORITHMS;

ION BEAMS;

EID: 85136187635 PISSN: None EISSN: 21622701 Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper

Times cited : (11)

References (9)

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2
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3
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- T. W. Drueding, S.W. Fawcett, S. R. Wilson and T. G. Bifano: Opt. Eng. 34 (1995) 3565
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- Drueding, T. W.¹ Fawcett, S.W.² Wilson, S. R.³ Bifano, T. G.⁴

5
- 85166708106
- T. Hänsel, A. Nickel, H.-J. Thomas, A. Schindler, R. Schwabe, Local Thickness Correction of Nanometer Thin Films by Means of Ion Beam Etching, this conference
- Local Thickness Correction of Nanometer Thin Films by Means of Ion Beam Etching, this conference
- Hänsel, T.¹ Nickel, A.² Thomas, H.-J.³ Schindler, A.⁴ Schwabe, R.⁵

6
- 0016953853
- May
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- (1976) J. Opt. Soc. Am , vol.66 , Issue.5
- Hill, N. R.¹ Ioup, G. E.²

7
- 0000527070
- Y. Furukawa, Y. Mori, T. Kataoka, (Eds), The Japanese Society for Precision Engineering, Tokyo
- A. Schindler, T. Haensel, D. Flamm, A. Nickel, H. - J. Thomas and F. Bigl, Precision Science and Technology for Perfect Surfaces, Y. Furukawa, Y. Mori, T. Kataoka, (Eds.), © The Japanese Society for Precision Engineering, Tokyo, 1999, pp. 243 - 248
- (1999) Precision Science and Technology for Perfect Surfaces , pp. 243-248
- Schindler, A.¹ Haensel, T.² Flamm, D.³ Nickel, A.⁴ Thomas, H. - J.⁵ Bigl, F.⁶

8
- 0035759288
- Ion beam and plasma jet etching for optical component fabrication
- A. Schindler, T. Haensel, D. Flamm, W. Frank, G. Boehm, F. Frost, R. Fechner, F. Bigl, B. Rauschenbach, Ion beam and plasma jet etching for optical component fabrication, Proc. SPIE Vol. 4440, p. 217-227
- Proc. SPIE , vol.4440 , pp. 217-227
- Schindler, A.¹ Haensel, T.² Flamm, D.³ Frank, W.⁴ Boehm, G.⁵ Frost, F.⁶ Fechner, R.⁷ Bigl, F.⁸ Rauschenbach, B.⁹

9
- 85053162898
- Ion beam figuring and ion beam polishing production tools processing technology included for customized solutions
- (Optical Society of America, Washington DC)
- A. Schindler, T. Haensel, M. Zeuner, G. Seidenkranz, Ion beam figuring and ion beam polishing production tools processing technology included for customized solutions, OSA Technical Digest (Optical Society of America, Washington DC, 2000), pp. 135-137
- (2000) OSA Technical Digest , pp. 135-137
- Schindler, A.¹ Haensel, T.² Zeuner, M.³ Seidenkranz, G.⁴

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