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Volumn 4, Issue SUPPL.1, 2007, Pages

Properties of siloxane coatings deposited in a reel-to-reel atmospheric pressure plasma system

Author keywords

Atmospheric pressure glow discharge (APGD); Films; Organosilicon precursors; Oxidation efficiency

Indexed keywords

ATMOSPHERIC PRESSURE GLOW DISCHARGE (APGD); ATMOSPHERIC PRESSURE PLASMAS; COATING SURFACE; CONCENTRATION OF; DEPOSITED COATINGS; HEXAMETHYL DISILOXANE; NANOMETRES; OCTAMETHYLCYCLOTETRASILOXANE; ORGANOSILICON PRECURSORS; OXIDATION EFFICIENCY; PROCESSING CONDITION; SILOXANE COATINGS; TETRA-ETHYL-ORTHO-SILICATE;

EID: 43249098222     PISSN: 16128850     EISSN: 16128869     Source Type: Journal    
DOI: 10.1002/ppap.200731205     Document Type: Conference Paper
Times cited : (36)

References (16)
  • 8
    • 0003684325 scopus 로고    scopus 로고
    • H. G. Tompkins, W. A. McGahan, Eds, John Wiley and Sons, New York
    • H. G. Tompkins, W. A. McGahan, Eds., "Spectroscopic Ellipsometry and Reflectometry", John Wiley and Sons, New York 1999.
    • (1999) Spectroscopic Ellipsometry and Reflectometry


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.