Analytical analysis of a circular PZT actuator for valveless micropumps

Sensors and Actuators, A: Physical

Volumn 104, Issue 2, 2003, Pages 151-161

  Li, Shifeng ^a   Chen, Shaochen ^a  

^a The University of Texas at Austin   (United States)

Author keywords

Analytical analysis; MEMS; PZT actuator; Valveless micropump

Indexed keywords

COMPUTER SIMULATION; ELASTIC MODULI; FINITE ELEMENT METHOD; PIEZOELECTRIC DEVICES; POISSON RATIO; PUMPS;

VALVELESS MICROPUMPS;

MICROACTUATORS;

EID: 0037446344     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(03)00006-2     Document Type: Article

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