Fabrication of microdevices using bulk ceramics of lead zirconate titanate

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 44, Issue 9 B, 2005, Pages 7068-7071

  Tanaka, Katsuhiko ^a   Konishi, Takahiro ^a   Ide, Masato ^a   Meng, Zhicong ^a   Sugiyama, Susumu ^a  

^a RITSUMEIKAN UNIVERSITY   (Japan)

Author keywords

Bonding; Bulk ceramics; Diaphragm; Excimer laser; Lead zirconate titanate; Microdevices; Si

Indexed keywords

CERAMIC MATERIALS; EXCIMER LASERS; GOLD; SILICON; SINGLE CRYSTALS; THIN FILMS;

BULK CERAMICS; LEAD ZIRCONATE TITANATE (PZT); MICRODEVICES;

LEAD COMPOUNDS;

EID: 31844439466     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.44.7068     Document Type: Article

References (3)

1. K. Tanaka, A. Sakurai, T. Kubota and Y. Sakabe: IEEJ Trans. SM 123 (2003) 548.
2. K. Tanaka, T. Konishi, W. Kuze and S. Sugiyama: Jpn. J. Appl. Phys. 43 (2004) 6672.
3. K. Tanaka, W. Kuze, T. Konishi, A. Shimazu and S. Sugiyama: Proc. 21st Sensor Symp. (2004) p. 469.