Piezoelectric unimorph microactuator arrays for single-crystal silicon continuous-membrane deformable mirror

Journal of Microelectromechanical Systems

Volumn 15, Issue 2, 2006, Pages 370-379

  Hishinuma, Yoshikazu ^a,b   Yang, Eui Hyeok ^b  

^a FUJIFILM CORPORATION   (Japan)

^b CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Adaptive optics; Deformable mirror; PZT actuator; Space telescopes; Unimorph membrane actuator

Indexed keywords

ADAPTIVE OPTICS; COMPUTER SIMULATION; MATHEMATICAL MODELS; MEMBRANES; MIRRORS; OPTIMIZATION; PIEZOELECTRIC DEVICES; SILICON; SINGLE CRYSTALS; SPACE TELESCOPES;

DEFORMABLE MIRROR; LEAD ZIRCONIUM TITANATE; UNIMORPH MEMBRANE ACTUATOR;

MICROACTUATORS;

EID: 33645787845     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2006.872229     Document Type: Article

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