The fabrication of silicon-based PZT microstructures using an aerosol deposition method

Journal of Micromechanics and Microengineering

Volumn 18, Issue 5, 2008, Pages

  Wang, Xuan Yu ^a   Lee, Chi Yuan ^b   Hu, Yuh Chung ^c   Shih, Wen Pin ^d   Lee, Chih Cheng ^e   Huang, Jung Tang ^e   Chang, Pei Zen ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^b YUAN ZE UNIVERSITY   (Taiwan)

^c HUAFAN UNIVERSITY   (Taiwan)

^d NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^e NATIONAL TAIPEI UNIVERSITY OF TECHNOLOGY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

AEROSOLS; DEPOSITION; PHOTORESISTS; PIEZOELECTRIC MATERIALS; SILICON; THICK FILMS;

LOW TEMPERATURE DEPOSITION;

MICROSTRUCTURE;

EID: 42549133527     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/18/5/055034     Document Type: Article

References (27)

1. Morita T, Kurosawa M K and Higuchi T 2000 A cylindrical shaped micro ultrasonic motor utilizing PZT thin film Sensors Actuators A 83 225-30
2. Kim S K and Seo Y H 2006 Fabrication and characterization of the piezoelectric microtransformer based on microelectromechanical systems Appl. Phys. Lett. 88 263510
3. Vasic D, Sarraute E, Costa F, Sangouard P and Cattan E 2004 Piezoelectric micro-transformer based on PZT unimorph membrane J. Micromech. Microeng. 14 S90-S96
4. Jeon Y B, Sood R, Jeong J H and Kim S G 2005 MEMS power generator with transverse mode thin film PZT Sensors Actuators A 122 16-22
5. Kanda T, Morita T, Kurosawa M K and Higuchi T 2000 A flat type touch probe sensor using PZT thin film vibrator Sensors Actuators A 83 67-75
6. Fang J, Wang K and Böhringer K F 2006 Self-assembly of PZT actuators for micropumps with high process repeatability J. Microelectromech. Syst. 15 871-8
7. 3 thin films deposited by sol-gel Thin Solid Films 458 114-20
8. Hata T, Kawagoe S, Zhang W, Sasaki K and Yoshioka Y 1998 Proposal of new mixture target for PZT thin films by reactive sputtering Vacuum 51 665-71
9. Pu X, Luo W, Ding A, Tian H and Qiu P 2001 Preparation of PZT thick films by one-step firing sol-gel process Mater. Res. Bull. 36 1471-8
10. Kanda T, Kurosawab M K, Yasuia H and Higuchi T 2001 Performance of hydrothermal PZT film on high intensity operation Sensors Actuators A 89 16-21
11. Wang S N, Li J F, Toda R, Watanabe R, Minami K and Esashi M 1998 Novel processing of high aspect ratio 1-3 structures of high density PZT Proc. IEEE MEMS'98 Conf. pp 223-8
12. Zhao H J, Ren T L, Liu L S, Liu L T and Li Z J 2003 High quality PZT thick films using silicon mold technique for MEMS applications Transducers'03 pp 923-6
13. Dorey R A, Whatmore R W, Beeby S P, Torah R N and White N M 2003 Screen printed PZT thick films using composite film technology Integr. Ferroelectr. 54 651-8
14. Gentry K L, Zara J M, Bu S D, Eom C B and Smith S W 2000 Thick film sol gel PZT transducer using dip coating 2000 IEEE Ultrason. Symp. pp 977-80
15. Jacobsen H, Quenzer H J, Wagner B, Ortner K and Jung T 2006 High-rate sputtering of thick PZT layers for MEMS actuators Proc. IEEE MEMS'06 Conf. pp 214-7
16. Lebedev M, Akedo J and Akiyama Y 2000 Actuation properties of lead zirconate titanate thick films structured on Si membrane by the aerosol deposition method Japan. J. Appl. Phys. 39 5600-3
17. Park J H, Akedo J and Sato H 2007 High-speed metal-based optical microscanners using stainless-steel substrate and piezoelectric thick films prepared by aerosol deposition method Sensors Actuators A 135 86-91
18. Akedo J, Ichiki M, Kikuchi K and Maeda R 1998 Jet molding system for realization of three-dimensional micro-structures Sensors Actuators A 69 106-12
19. Lebedev M and Akedo J 2002 Patterning properties of PZT thick films made by aerosol deposition Ferroelectrics 270 117-22
20. Akedo J 2004 Aerosol deposition method for fabrication of nano crystal ceramic layer Mater. Sci. Forum 449-452 43-8
21. Akedo J 2006 Aerosol deposition of ceramic thick films at room temperature: densification mechanism of ceramic layers J. Am. Ceram. Soc. 89 1834-9
22. Akedo J, Lebedev M and Baba 2003 S aerosol deposition method for preparation of lead zirconate titanate thick layer at low temperature- improvement of electrical properties by irradiation of fast atom beam and plasma Japan. J. Appl. Phys. 42 5931-5
23. Akedo J and Lebedev M 2002 Powder preparation in aerosol deposition method for lead zirconate titanate tick films Japan. J. Appl. Phys. 41 6980-4
24. IEEE 1987 IEEE Std 176-987 (New York: IEEE Press)
25. Zhao H J, Ren T L, Liu J S, Liu L T and Li Z J 2003 Fabrication of high quality PZT thick film using lift-off technique Proc. Nanotech 2003 pp 502-5
26. Choe S-H, Tanaka S and Esashi M 2007 MEMS-based probe array for wafer level LSI testing transferred onto low CTE LTCC substrate by Au/Sn eutectic bonding Proc. Transducers 2007 pp 2517-20
27. 2 gas for release process Sensors Actuators A 117 1-7