Jet molding system for realization of three-dimensional micro-structures

Sensors and Actuators, A: Physical

Volumn 69, Issue 1, 1998, Pages 106-112

  Akedo, J ^a   Ichiki, M ^a   Kikuchi, K ^a   Maeda, R ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Excimer laser ablation; Jet molding system; Mask deposition; Microfabrication; PZT; Ultrafine particles

Indexed keywords

ACTUATORS; DENSITY MEASUREMENT (SPECIFIC GRAVITY); ELECTRIC VARIABLES MEASUREMENT; ELECTRODES; EXCIMER LASERS; LASER ABLATION; MICROSTRUCTURE; SCANNING ELECTRON MICROSCOPY; SENSORS;

EXCIMER LASER ABLATION; GAS DEPOSITION METHOD; INSERT MOLDING METHOD; JET MOLDING SYSTEM; MASK DEPOSITION METHOD; THREE DIMENSIONAL MICROSTRUCTURES; ULTRAFINE PARTICLES;

INJECTION MOLDING;

EID: 0032095545     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(98)00059-4     Document Type: Article

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