Fabrication of high quality PZT thick film using lift-off technique

2003 Nanotechnology Conference and Trade Show - Nanotech 2003

Volumn 1, Issue , 2003, Pages 502-505

  Zhao, Hong Jin ^a   Ren, Tian Ling ^a   Liu, Jian She ^a   Liu, Li Tian ^a   Li, Zhi Jian ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

Lift off; Piezoelectric; PZT; SU 8; Thick Film

Indexed keywords

CERAMIC MATERIALS; MICROSENSORS; PHOTORESISTS; SOL-GELS; THERMOGRAVIMETRIC ANALYSIS; THICK FILMS; ULTRASONIC TRANSDUCERS; X RAY DIFFRACTION ANALYSIS;

ACTUATOR FORCES; LIFT-OFF; RADIO-FREQUENCY; SILICON SUBSTRATES;

PIEZOELECTRIC TRANSDUCERS;

EID: 6344263837     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)

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3. S. N. Wang, et al, Proc. of Transducers'99, pp.1762-1763, 1999.
4. N. Futai, et al, Proc. of IEEE MEMS 2002, pp.168-171, 2002.