High quality PZT thick films using silicon mold technique for MEMS applications

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 1, Issue , 2003, Pages 923-926

  Zhao, Hong Jin ^a   Ren, Tian Ling ^a   Liu, Jian She ^a   Liu, Li Tian ^a   Li, Zhi Jian ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

Anisotropic magnetoresistance; Dielectric losses; Etching; Fabrication; Micromechanical devices; Piezoelectric films; Radio frequency; Semiconductor films; Silicon; Thick films

Indexed keywords

ACTUATORS; ANISOTROPY; CERAMIC MATERIALS; DIELECTRIC DEVICES; DIELECTRIC LOSSES; ENHANCED MAGNETORESISTANCE; ETCHING; FABRICATION; FERROELECTRIC CERAMICS; MICROSYSTEMS; MOLDS; PIEZOELECTRICITY; RADIO WAVES; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICES; SILICON; SOLS; THICK FILMS; TRANSDUCERS;

FERROELECTRIC HYSTERESIS LOOP; MICROMECHANICAL DEVICE; PIEZOELECTRIC FILM; PIEZOELECTRIC PROPERTY; RADIO FREQUENCIES; REMNANT POLARIZATIONS; SEMICONDUCTOR FILMS; SILICON ANISOTROPIC ETCHING;

SOLID-STATE SENSORS;

EID: 84944727644     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1215626     Document Type: Conference Paper

References (4)

1. S. Takahashi, "Multilayer Piezoelectric Ceramic Actuators and Their Applications", Jpn. J. Appl. Phys., Vol. 24, no. 2, pp. 41-45, 1985.
2. H. Moilanent, J. Lappalainen, S. Leppavuori, "Development of a Piezoelectric Micromovement Actuator Fabrication Using a Thick Film Double Paste Printing Method", Proc. of Transducers'93, pp.166-169, 1993.
3. S. N. Wang, K. Wakabayashi, J. F. Li, M. Esashi, "Batch Fabrication of Stacked Piezoelectric Micro-actuators by Using Silicon Mold Process", Proc. of Transducers'99, pp.1762-1763, 1999.
4. N. Futai, K. Matsumoto, I. Shimoyama, "Fabrication of High-Aspect-Ratio PZT Thick Film Structure Using Sol-Gel Technique and SU-8 Photoresist" , Proc. of IEEE MEMS 2002, pp.168-171, 2002.