Patterning properties of PZT thick films made by aerosol deposition

Ferroelectrics

Volumn 270, Issue , 2002, Pages 117-122

  Lebedev, Maxim ^a   Akedo, Jun ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Aerosol deposition method; Micro fabrication; Piezoelectric thick film; PZT; Structuring; Ultrafine particles

Indexed keywords

AEROSOLS; DEPOSITION; FABRICATION; IRON COMPOUNDS;

AEROSOL DEPOSITION METHOD; MICRO FABRICATION; PIEZOELECTRIC THICK FILM; PZT; STRUCTURING; ULTRAFINE PARTICLES;

THICK FILMS;

EID: 32444435436     PISSN: 00150193     EISSN: 15635112     Source Type: Conference Proceeding    
DOI: 10.1080/00150190211232     Document Type: Conference Paper

References (15)

1. J. Akedo, Oyo Buturi, 68, 44 (1999) (in Japanese)
2. B H. D. Chen, K. R. Udayakumar, and L. E. Cross, J. Appl. Phys., 77, 3349 (1995)
3. M.R. Poor, and C. B. Fledderman, J. Appl. Phys., 70, 3385 (1991)
4. C. W. Chung, J. Vac. Sci. Technol. B. 16, 1984 (1998)
5. K. Saito, J. H. Choi, T. Fukuda, and M. Ohue, Jpn. J. Appl. Phys., 31, L1260 (1992)
6. T. Ide, Y. Mori, I. Konda, N. Ikawa and H. Yagi, J. Proc. Eng. Jpn., 57, 5, 143 (1991) (in Japanese).
7. J.F. de la Mora, S. V. Hering, N. P. Rao, and P. H. McMurry, J. Aerosol Sci., 21, 169 (1990).
8. Yamada, H., Takaoka, H., and T. Takagi, J. Vac. Sci. Technol. A, 4, 722 (1986).
9. S. Kasyu, E. Fuchita, and T. Manabe and C. Hayashi, Jpn. J. Appl. Phys., 23, 12, L910 (1984).
10. J. Akedo, M. Ichiki, K. Kikuchi, and R. Maeda, Sens. & Actuat. A, 69, 106 (1998)
11. J. Akedo, N. Minami, K. Fukuda, M. Ichiki and R. Maeda, Ferroelectrics, 231, 285 (1999)
12. J. Akedo and M. Lebedev: Appl. Phys. Lett., 77, 11, 1710 (2000)
13. J. Akedo and M. Lebedev, Jpn. J. Appl. Phys., 38, 9, 5397 (1999)
14. M. Lebedev, J.Akedo and Y. Akiyama, Jpn. J. Appl. Phys. 39, 9, 5600 (2000)
15. M. Lebedev, J. Akedo, K. Mori, and T. Eiju, J. Vac. Sci. Technol. A, 18, 2, 563 (2000)