Flat type touch probe sensor using PZT thin film vibrator

Sensors and Actuators, A: Physical

Volumn 83, Issue 1, 2000, Pages 67-75

  Kanda, T ^a   Morita, T ^a   Kurosawa, M K ^a   Higuchi, T ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC POTENTIAL; LEAD COMPOUNDS; MECHANICAL VARIABLES MEASUREMENT; NATURAL FREQUENCIES; PROBES; THIN FILMS; VIBRATORS;

LEAD ZIRCONATE TITANATE; TOUCH PROBE SENSOR;

MICROSENSORS;

EID: 0033740635     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(00)00298-3     Document Type: Article

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