Aerosol deposition of ceramic thick films at room temperature: Densification mechanism of ceramic layers

Journal of the American Ceramic Society

Volumn 89, Issue 6, 2006, Pages 1834-1839

  Akedo, Jun ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AEROSOLS; ALUMINUM COMPOUNDS; CERAMIC MATERIALS; DENSIFICATION; DEPOSITION; SUBSTRATES; TRANSMISSION ELECTRON MICROSCOPY;

AEROSOL DEPOSITION; CERAMIC LAYERS; CERAMIC PARTICLES; ROOM TEMPERATURE;

THICK FILMS;

EID: 33744796236     PISSN: 00027820     EISSN: 15512916     Source Type: Journal    
DOI: 10.1111/j.1551-2916.2006.01030.x     Document Type: Conference Paper

References (23)

1. J. Akedo and M. Lebedev, "Aerosol Deposition Method(ADM): A Novel Method of PZT Thick Films Producing for Microactuators," Recent Res. Dev. Mater. Sci., 2, 51-77 (2001).
2. J. Akedo and M. Kiyohara, "Nanostructuring and Shock Compaction Using Fine Particle Beam - Aeorsol Deposition for Forming of Nanocrystal Layer and Powder Techology," J. Soc. Powder Tech. Jpn., 40 [3] 192-201 (2003).
3. J., Akedo, "Aerosol Deposition Method for Fabrication of Nano Crystal Ceramic Layer," Mater. Sci. Forum, 449-452, 43-8 (2004).
4. 3Thick Film deposited with Aerosol Deposition Method," Jpn. J. Appl. Phys., 38, 5397-401 (1999).
5. 3 Thick Films Prepared for Microactuators by Aerosol Deposition Method," Appl. Phys. Lett., 77-11, 1710-2 (2000).
6. N. Asai, R. Matsuda, M. Watanabe, H. Takayama, S. Yamada, A. Mase, M. Shikida, K. Sato, M. Lebedev, and J. Akedo, A Novel High Resolution Optical Scanner Actuated by Aerosol Deposited PZT Films. Proceedings of IEEE Micro Electro Mechanical Systems, pp. 247-50. Institute of Electrical and Electronics Engineers, Inc., Kyoto, 2003.
7. 3 Thick Films Formed by Aerosol Deposition," Jpn. J. Appl. Phys., 44, 7072-7 (2005).
8. Y. Imanaka, M. Takenouchia, and J. Akedo, "Ceramic Dielectric Film for Microwave Filter Deposited at Room Temperature," J. Cryst. Growth, 275, e1313-9 (2005).
9. S. M. Nam, N. Mori, H. Kakemoto, S. Wada, J. Akedo, and T. Tsurami, "Alumina Thick Films as Integral Substrates Using Aerosol Deposition Process," Jpn. J. Appl. Phys., 43, 5414-8 (2004).
10. S. M. Nam, H. Yabe, H. Kakemoto, S. Wada, J. Akedo, and T. Tsurumi, "Enhancement in Dielectric Properties of Aerosol-Deposited Barium Tilanate Films for Embedded Capacitors," Jpn. J. Appl. Phys., (2006), to be published.
11. 4 Composite Films Prepared by Aerosol Deposition Method"; INTERMAG 2005, Nagoya Japan, April 4-8, EC-04, 2005.
12. H. Takagi, M. Mizoguchi, J. H. Park, K. Nishimura, H. Uchida, M. Lebedev, J. Akedo, and M. Inoue, "PZT-Driven Micromagnetic Optical Devices," Mater. Res. Soc. Symp. Proc., 785, pD6.10.1-6 (2004).
13. 3 (x = 0. 0.3, 0.6) Films Prepared by Aerosol Deposition," Jpn. J. Appl. Phys., 44, L1088-90 (2005).
14. J. Akedo, M. Lebedev, A. Iwata, H. Ogiso, and S. Nakano, "Aerosol Deposition Method (ADM) for Nano-Crystal Ceramics Coating Without Firing," Mater. Res. Soc. Symp. Proc., 778 [U8.10/W7.10] 289-94 (2003).
15. J. Akedo and M. Lebedev, "Powder Preparation for Lead Zirconate Titanate Thick Films in Aerosol Deposition Method." Jpn. J. Appl. Phys., 41, 6980-4 (2002).
16. 3 Thin Films Prepared by Aerosol Deposition Method," Jpn. J. Appl. Phys., 40, 5528-32 (2001).
17. M. Levedev, J. Akedo, K. Mori, and T. Eiju, "Simple Self-Selective Method of Velocity Measurement for Particles in Impact-Dased Deposition," J. Vac. Sci. Technol. A, 18, 563-5 (2000).
18. G. R. Johnson and T. J. Holmquist, "An Improved Computational Constitutive Modele for Brittle Materials"; pp. 981-4 in High Pressure Science and Technology - 1993, Vol. 2, Edited by S. C. Schmidt, J. W. Shaner, G. A. Samara, and M. Ross. AIP Press, New York, 1994.
19. T. J. Holmquist, G. R. Johnson, D. E. Grady, C. M. Lopatin, and E. S. Hertel, "High Strain Rate Properties and Constitutive Modeling of Glass"; pp. 237-44. Proceedings of 15th International Symposium on Ballistics, TB31, Jerusalem, Israel, May 21-24, 1995.
20. 3 Ceramic Tiles"; pp. 65-72. Proceedings of 15th International Symposium on Ballistics, G6, Jerusalem, Israel, May 21-24, 1995.
21. 4 Nanoerystalline Ceramics: Mechanism of Consolidation and of Transition from α- to β-Form," J. Am. Ceram. Soc., 77, 487-92 (1994).
22. 4 Powder," J. Mater. Sci., 20, 391-8 (1985).
23. M. Yoshida, H. Ogiso, S. Nakano, and J. Akedo, "Compression Test System for a Single Submicron Particle," Rev. Sci. Instr., 76, 093905 (2005).