Accurate measurements of the intrinsic diffusivities of boron and phosphorus in silicon

Applied Physics Letters

Volumn 77, Issue 13, 2000, Pages 1976-1978

  Haddara, Yaser M ^a   Folmer, Brennan T ^b   Law, Mark E ^b   Buyuklimanli, Temel ^c  

^a CoRelation Inc ^*  (United States)

^b University of Florida   (United States)

^c Evans East   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000426452     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1313248     Document Type: Article

References (18)

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