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Volumn 74, Issue 22, 1999, Pages 3377-3379

The impact of supersaturated carbon on transient enhanced diffusion

Author keywords

[No Author keywords available]

Indexed keywords


EID: 0038795297     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.123350     Document Type: Article
Times cited : (44)

References (23)
  • 20
    • 0002734525 scopus 로고
    • edited by F. F. Y. Wang North-Holland, Amsterdam, The Netherlands
    • R. B. Fair, in Impurity Doping Processes in Silicon, edited by F. F. Y. Wang (North-Holland, Amsterdam, The Netherlands, 1981), p. 315.
    • (1981) Impurity Doping Processes in Silicon , pp. 315
    • Fair, R.B.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.