Silicon planar lenses for high energy X-ray nanofocusing

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6705, Issue , 2007, Pages

  Snigirev, A ^a   Snigireva, I ^a   Grigoriev, M ^b   Yunkin, V ^b   Di Michiel, M ^a   Kuznetsov, S ^b   Vaughan, G ^a  

^a EUROPEAN SYNCHROTRON RADIATION FACILITY   (France)

^b INSTITUTE OF MICROELECTRONICS TECHNOLOGY AND HIGH PURITY MATERIALS   (Russian Federation)

Author keywords

High energy; Nanofocusing; Planar microfabrication technology; Refractive lenses; X rays

Indexed keywords

MICROPROCESSOR CHIPS; OPTICAL DESIGN; OPTIMIZATION; SEMICONDUCTING SILICON; SURFACE ROUGHNESS; THICKNESS MEASUREMENT; TWO DIMENSIONAL;

HIGH ENERGY; NANOFOCUSING; PLANAR MICROFABRICATION TECHNOLOGY; REFRACTIVE LENSES;

LENSES;

EID: 42149086139     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.733609     Document Type: Conference Paper

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