Focusing properties of X-ray polymer refractive lenses from SU-8 resist layer

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5195, Issue , 2003, Pages 21-31

  Snigirev, A ^a   Snigireva, I ^a   Drakopoulos, M ^a   Nazmov, V ^b   Reznikova, E ^b   Kuznetsov, S ^c   Grigoriev, M ^c   Mohr, J ^b   Saile, V ^b  

^a EUROPEAN SYNCHROTRON RADIATION FACILITY   (France)

^b KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

^c INSTITUTE OF MICROELECTRONICS TECHNOLOGY AND HIGH PURITY MATERIALS   (Russian Federation)

Author keywords

Deep lithography; Focusing; Imaging; Planar refractive lenses

Indexed keywords

FABRICATION; FOCUSING; IMAGING TECHNIQUES; LIGHT REFRACTION; LITHOGRAPHY; OPTICAL COLLIMATORS; SYNCHROTRON RADIATION; X RAY DIFFRACTION; X RAY OPTICS;

DEEP LITHOGRAPHY; PLANAR REFRACTIVE LENSES;

PLASTIC LENSES;

EID: 1842531170     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.507111     Document Type: Conference Paper

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