Planar parabolic lenses for focusing high energy X-rays

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4501, Issue , 2001, Pages 185-192

  Grigoriev, M ^a   Shalbenikov, L ^a   Yunkin, V ^a   Snigirev, A ^b   Snigireva, I ^b   Di Michiel, M ^b   Kuznetsov, S ^b   Hoffmann, M ^c   Voges, E ^c  

^a INSTITUTE OF MICROELECTRONICS TECHNOLOGY AND HIGH PURITY MATERIALS   (Russian Federation)

^b EUROPEAN SYNCHROTRON RADIATION FACILITY   (France)

^c TU DORTMUND UNIVERSITY   (Germany)

Author keywords

Col limation; Focusing; Lenses; Microfabrication; Parabolic; Refraction; Silicon; X rays

Indexed keywords

ELECTRON DEVICE MANUFACTURE; FOCUSING; LENSES; MICROELECTRONICS; OPTICAL COLLIMATORS; PHOTOLITHOGRAPHY; PLASMA ETCHING; REFRACTIVE INDEX; SILICON; SYNCHROTRON RADIATION; TWO DIMENSIONAL;

COLLIMATION; HIGH ENERGY X RAYS; HIGHLY ANISOTROPIC PLASMA ETCHING TECHNIQUES; MICROFABRICATION; PLANAR PARABOLIC LENSES; TWO LENS SYSTEM;

X RAYS;

EID: 0035765670     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.448494     Document Type: Article

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