Nanofocusing parabolic refractive x-ray lenses

Applied Physics Letters

Volumn 82, Issue 9, 2003, Pages 1485-1487

  Schroer, C G ^a   Kuhlmann, M ^a   Hunger, U T ^a   Gunzler T F ^a   Kurapova, O ^a   Feste, S ^a   Frehse, F ^a   Lengeler, B ^a   Drakopoulos, M ^b   Somogyi, A ^b   Simionovici, A S ^b   Snigirev, A ^b   Snigireva, I ^b   Schug, C ^c   Schroder W H ^d  

^a RWTH AACHEN UNIVERSITY   (Germany)

^b EUROPEAN SYNCHROTRON RADIATION FACILITY   (France)

^c IBM   (Germany)

^d FORSCHUNGSZENTRUM JÜLICH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DIAMONDS; ELECTROMAGNETIC WAVE REFRACTION; SYNCHROTRON RADIATION; X RAYS;

X-RAY LENSES;

LENSES;

EID: 0037416639     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1556960     Document Type: Article

References (18)

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16. For the lenses considered here, the thin lens approximation no longer holds. All calculations in this letter include thick lens effects.
17. For the calculation of the expected microbeam size, an effective source size of 900 μm, (horizontally) by 60 μm (vertically) was assumed, given by measurements with other optics.
18. The proximity effect in the e-beam lithography step and slight underetching by the deep trench reactive ion etching process introduce a shift of the lens surface, resulting in a larger radius of curvature and spherical aberrations. While we attempted to compensate for these effects, the experiment suggests that further corrections are needed to generate an ideal parabolic lens shape.