Mechanical bonding of two identical silicon planar refractive lenses

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5539, Issue , 2004, Pages 251-258

  Yunkin, V ^a   Grigoriev, M ^a   Kuznetsov, S ^a   Snigirev, A ^b   Snigireva, I ^b  

^a INSTITUTE OF MICROELECTRONICS TECHNOLOGY AND HIGH PURITY MATERIALS   (Russian Federation)

^b EUROPEAN SYNCHROTRON RADIATION FACILITY   (France)

Author keywords

Bonding; Lenses; Planar; Refraction; Silicon; X rays

Indexed keywords

ASPECT RATIO; MICROELECTROMECHANICAL DEVICES; PHOTOLITHOGRAPHY; PLASMA ETCHING; REFRACTION; SILICON; SILICON WAFERS; SYNCHROTRON RADIATION; X RAY OPTICS;

PATTERN GENERATION; SILICON REFRACTIVE LENSES; X-RAY FOCUSING; X-RAY LENSES;

LENSES;

EID: 15844363478     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.564872     Document Type: Conference Paper

References (6)

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