Thermal stability of Cr1-xAlxSiyN coatings with medium to high aluminium content prepared by arc evaporation

Materials Research Society Symposium Proceedings

Volumn 890, Issue , 2006, Pages 85-90

  Karvankova, Pavla ^a   Karimi, Ayat ^a   Coddet, Olivier ^b   Cselle, Tibor ^b   Morstein, Marcus ^b  

^a EPFL   (Switzerland)

^b Platit AG   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; MICROSTRUCTURE; NANOSTRUCTURED MATERIALS; SCANNING ELECTRON MICROSCOPY; THERMODYNAMIC STABILITY; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

NANOINDENTATION TECHNIQUES; PHASE STRUCTURES; ROTATING CYLINDRICAL CATHODES; SINGLE-PHASE CUBIC CRAIN STRUCTURE;

PROTECTIVE COATINGS;

EID: 33646428377     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (31)

1. W. D. Münz, J. Vac. Sci. Technol. A 4 (6), 2717 (1986).
2. O. Knotek, M. Bohmer, T. Leyendecker, J. Vac. Sci. Technol. A 4 (6), 2695 (1986).
3. S. PalDey, S. C. Deevi, Mat. Sci. Eng. A 342, 58 (2003).
4. A. Horling, L. Hultman, M. Oden, et al., J. Vac. Sci. Technol. A 20 (5), 1815 (2002).
5. T. Suzuki, Y. Makina, M. Samandi, et al., J. Mat. Sci. 35, 4193 (2000).
6. Y. Makino, ISIJ Int. 38 (9), 925 (1998).
7. M. Kawate, A. K. Hashimoto, T. Suzuki, Surf. Coat. Technol. 165, 163 (2003).
8. A. E. Reiter, V. H. Derflinger, B. Hanselmann, et al., Surf. Coat. Technol., in print (2005).
9. A. Sugishima, H. Kajioka, Y. Makino, Surf. Coat. Technol. 97, 590 (1997).
10. Y. Makino, K. Nogi, Surf. Coat. Technol. 98, 1008 (1998).
11. A. Kimura, M. Kawate, H. Hasegawa, et al., Surf. Coat. Technol. 169-170, 367 (2003).
12. H. Hasegawa, T. Suzuki, Surf. Coat. Technol. 188-189, 234 (2004).
13. O. Knotek, M. Atzor, A. Barimani, et al., Surf. Coat. Technol. 42, 21 (1990).
14. H. W. Hugosson, H. Hogberg, M. Algren, et al., J. Appl. Phys. 93, 4505 (2003).
15. S. Veprek, H.-D. Männling, M. Jilek, et al., Mat. Sci. Eng. A 366, 202 (2004).
16. A. E. Santana, PhD Thesis, EPFL Lausanne (2004).
17. Y. Tanaka. N. Ichimiya, Y. Onishi, et al., Surf. Coat. Technol. 146-147, 215 (2001).
18. E. Ribeiro, A. Malczyk, S. Carvalho, et al., Surf. Coat. Technol. 151-152, 515 (2002).
19. Hitachi Tool Engineering Ltd., EU Patent No. EP 1 422 311 A2 (26 May 2004).
20. M. Parlinska-Wojtan, A. Karimi, T. Cselle, et al., Surf. Coat. Technol. 177-178, 376 (2004).
21. I. C. Noyan, J. B. Cohen, Residual Stress, (Springer-Verlag, New York, 1987).
22. H. P. Klug, L. E. Alexander, X-ray Diffraction Procedures, (Wiley, New York, 1974).
23. M. Parlinska-Wojtan, A. Karimi, O. Codet, et al., Surf. Coat. Technol. 188-189, 344 (2004).
24. D. Rafaja, M. Sima, V. Klemm, et al., J. Alloys and Compounds 378, 107 (2004).
25. A. Niederhofer, P. Nesladek, H. Männling, et al., Surf. Coat. Technol. 120-121, 173 (1999).
26. S. Carvalho, L. Rebouta, A. Cavaleiro, et al., Thin Solid Films 398-399, 391 (2001).
27. D. Rafaja,et al, Microstructure Analysis in Material Science, Freiberg, June 15 - 17, (2005).
28. P. B. Barna, in: Science and Technology of Thin Films, World Scientific Publ., p.1, (1995).
29. B. S. Yan, J. L. Huang, D. F. Lii, et al., Surf. Coat. Technol. 177-178, 209 (2004).
30. P. Karvankova, A. Karimi, O. Coddet, et al., ICMCTF San Diego, session B8 (2006).
31. R. Prange, R. Cremer, D. Neuschutz, Surf. Coat. Technol. 133-134, 208 (2000).