Real-time in situ growth study of TiN- and TiC xN y-based superhard nanocomposite coatings using spectroscopic ellipsometry

Applied Physics Letters

Volumn 88, Issue 7, 2006, Pages

  Jedrzejowski, P ^a   Amassian, A ^a   Bousser, E ^a   Klemberg Sapieha, J E ^a   Martinu, L ^a  

^a ÉCOLE POLYTECHNIQUE DE MONTRÉAL   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

FILM RESISTIVITY; IN SITU GROWTH; NANOCOMPOSITE FILMS; NANOCOMPOSITES;

ELECTRON SCATTERING; ELLIPSOMETRY; FILM GROWTH; IN SITU PROCESSING; NANOSTRUCTURED MATERIALS; REAL TIME SYSTEMS; SPECTROSCOPIC ANALYSIS;

TITANIUM COMPOUNDS;

EID: 32944480856     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2173719     Document Type: Article

References (30)

1. S. Veprek and A. S. Argon, Surf. Coat. Technol. 146-147, 175 (2001).
2. S. Veprek and A. S. Argon, J. Vac. Sci. Technol. B 20, 650 (2002).
3. Handbook of Hard Coatings; Deposition Technologies, Properties and Applications, edited by, R. F. Bunshah, (Noyes, Park Ridge, NJ, 2001).
4. S. Veprek, J. Vac. Sci. Technol. A 17, 2401 (1999).
5. J. Musil, F. Kunc, H. Zeman, and H. Polakova, Surf. Coat. Technol. 154, 304 (2002).
6. P. Jedrzejowski, J. E. Klemberg-Sapieha, and L. Martinu, Thin Solid Films 426, 150 (2003).
7. P. Jedrzejowski, B. Baloukas, J. E. Klemberg-Sapieha, and L. Martinu, J. Vac. Sci. Technol. A 22, 725 (2004).
8. P. Jedrzejowski, J. E. Klemberg-Sapieha, and L. Martinu, Thin Solid Films 466, 189 (2004).
9. P. Jedrzejowski, J. E. Klemberg-Sapieha, and L. Martinu, Surf. Coat. Technol. 188-189, 371 (2004).
10. G. G. Fuentes, E. Elizalde, and J. M. Sanz, J. Appl. Phys. 90, 2737 (2001).
11. S. Logothetidis, I. Alexandrou, and A. Papadopoulos, J. Appl. Phys. 77, 1043 (1995).
12. A. Amassian, R. Vernhes, J. E. Klemberg-Sapieha, P. Desjardins, and L. Martinu, Thin Solid Films 469-470, 47 (2004).
13. V. Korobov, M. Leibovitch, and Y. Shapira, Appl. Phys. Lett. 65, 2290 (1994).
14. X. W. Sun, H. C. Huang, and H. S. Kwok, Appl. Phys. Lett. 68, 2663 (1996).
15. P. Patsalas and S. Logothedis, J. Appl. Phys. 93, 989 (2003).
16. A. F. Mayadas and M. Shatzkes, Phys. Rev. B 1, 1382 (1970).
17. A. Amassian, P. Desjardins, and L. Martinu, Thin Solid Films 447-448, 40 (2004).
18. A. Amassian, P. Desjardins, and L. Martinu, J. Vac. Sci. Technol. A 24, 45 (2006).
19. P. Patsalas and S. Logothetidis, J. Appl. Phys. 93, 989 (2003).
20. J. C. Maxwell Garnett, Philos. Trans. R. Soc. London 205, 237 (1906).
21. O. M. Kuttel, J. E. Klemberg-Sapieha, L. Martinu, and M. R. Wertheimer, Thin Solid Films 193-194, 155 (1990).
22. J. F. Ziegler, J. P. Biersack, and U. Littmark, The Stopping and Range of Ions in Matter (Pergamon, New York, 1985), Vol. 1.
23. A. Amassian, M. Svec, P. Desjardins, and L. Martinu, J. Appl. Phys. (in press).
24. A. Amassian, M. Svec, P. Desjardins, and L. Martinu, J. Vac. Sci. Technol. A (in press).
25. F. Wooten, Optical Properties of Solids (Academic, New York, 1972).
26. C. Kittel, Introduction to Solid State Physics (Wiley, New York, 1986).
27. L. Hultman, G. Hakansson, U. Wahlstrom, J. E. Sundgren, I. Petrov, F. Adibi, and J. E. Greene, Thin Solid Films 205, 153 (1991).
28. K. Fuchs, Proc. Cambridge Philos. Soc. 34, 100 (1938).
29. P. E. Schmid, M. S. Sunaga, and F. Levy, J. Vac. Sci. Technol. A 16, 2870 (1998).
30. J. A. Floro, E. Chason, R. C. Cammarata, and D. J. Srolovitz, MRS Bull. 27, 19 (2002).