A piezoelectric microvalve for cryogenic applications

Journal of Micromechanics and Microengineering

Volumn 18, Issue 1, 2008, Pages

  Park, Jong M ^a   Taylor, Ryan P ^b   Evans, Allan T ^a   Brosten, Tyler R ^b   Nellis, Gregory F ^b   Klein, Sanford A ^b   Feller, Jeffrey R ^c   Salerno, Louis ^c   Gianchandani, Yogesh B ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

^b University of Wisconsin Madison   (United States)

^c NASA AMES RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BANDWIDTH; CRYOGENICS; DIES; FLOW CONTROL; MICROFABRICATION; PIEZOELECTRIC ACTUATORS; THERMAL GRADIENTS;

CRYOGENIC TEMPERATURES; FLOW MODULATION; GLASS WAFERS; MICROMACHINED DIES; MICROVALVES;

VALVES (MECHANICAL);

EID: 41849129219     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/18/1/015023     Document Type: Article

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