Development of a rapid-response flow-control system using MEMS microvalve arrays

Journal of Microelectromechanical Systems

Volumn 13, Issue 6, 2004, Pages 912-922

  Collier, John ^a   Wroblewski, Donald ^a   Bifano, Thomas ^a  

^a Boston University   (United States)

Author keywords

Closed loop systems; Fluid flow control; Microelectromechanical devices; Pulsewidth modulation (PWM); Valves

Indexed keywords

CLOSED LOOP CONTROL SYSTEMS; CONTROL SYSTEM SYNTHESIS; ELECTRONIC EQUIPMENT TESTING; FLOW CONTROL; MATHEMATICAL MODELS; MICROMACHINING; MICROSENSORS; POLYSILICON; PRECISION ENGINEERING; PULSE WIDTH MODULATION; VALVES (MECHANICAL);

FLOW CONTROL SYSTEM; FLUID FLOW CONTROL; MASS FLOW CONTROLLER (MFC); MICROMACHINED COMPONENT; MICROVALVE ARRAYS;

MICROELECTROMECHANICAL DEVICES;

EID: 10944255913     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2004.838392     Document Type: Article

References (8)

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3. C. Hodge, "The Evaluation of MEMS microvalve arrays for fluidic control," M.S. thesis, Boston Univ., MA, 2000.
4. C. Hodge, D. Wroblewski, and T. G. Bifano, "Evaluation of MEMS microvalve arrays as fluid controllers," in Proc. ASME Fluids Engineering Division Summer Meeting, 2000.
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8. MEMS-Flow™ Gas MFC, Product Specifications [Online]. Available: www.redwoodmicro.com/Datasheets/GMFC1-2w.pdf