Invited paper: Electromagnetically driven silicon microvalve for large-flow pneumatic controls

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3242, Issue , 1997, Pages 136-144

  Ikehara, Tsuyoshi ^a   Yamagishi, Hideaki ^a   Ikeda, Kyoichi ^a  

^a YOKOGAWA ELECTRIC CORPORATION   (Japan)

Author keywords

Electromagnetic actuator; Pneumatic control; Polysilicon; Pressure control; Silicon microvalve

Indexed keywords

ACTUATORS; ELECTRIC POWER UTILIZATION; ELECTRIC UTILITIES; ELECTROMAGNETISM; ELECTROMAGNETS; FLOW OF FLUIDS; MAGNETIC MATERIALS; MEMS; MICROELECTROMECHANICAL DEVICES; NONMETALS; PNEUMATIC CONTROL; PNEUMATIC CONTROL EQUIPMENT; PNEUMATICS; POLYSILICON; PRESSURE CONTROL;

AIR FLOWS; ASSEMBLY PROCESSES; DRIVING METHODS; ELECTRIC POWER CONSUMPTIONS; ELECTROMAGNETIC ACTUATOR; LARGE DISPLACEMENTS; LOW POWERS; MAGNETIC METALS; MEASURED RESULTS; MICROMACHINED; MICROVALVES; POLYSILICON LAYERS; RESPONSE TIMES; SHORT RESPONSE TIMES; SILICON CHIPS;

VALVES (MECHANICAL);

EID: 0004880935     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.293541     Document Type: Conference Paper

References (10)

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