3D microstructuring of glass using electrochemical discharge machining (ECDM)

Proceedings of the International Symposium on Micro Machine and Human Science

Volumn , Issue , 1999, Pages 179-183

  Fascio, Valia ^a   Wuthrich, Rolf ^a   Viquerat, Didier ^a   Langen, Hans ^a  

^a EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROLYTES; ETCHING; GLASS; MICROMACHINING; SECONDARY ION MASS SPECTROMETRY; SILICA;

ELECTROCHEMICAL DISCHARGE MACHINING;

MICROELECTROMECHANICAL DEVICES;

EID: 0033307723     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)