SCOPUS 정보 검색 플랫폼

Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

Volumn , Issue , 2006, Pages 248-251

A piezoelectricallyactuated ceramic-si-glass microvalve for distributed cooling systems

(9) Park, Jong M a Taylor, Ryan P b Evans, Allan T a Brosten, Tyler R b Nellis, Gregory F b Klein, Sanford A b Feller, Jeffrey R c Salerno, Louis c Gianchandani, Yogesh B a

a UNIVERSITY OF MICHIGAN (United States)

b University of Wisconsin Madison (United States)

c NASA AMES RESEARCH CENTER (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; CERAMIC MATERIALS; COOLING SYSTEMS; GLASS; MICROSYSTEMS; MODULATION; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS; THERMOELECTRIC EQUIPMENT;

ACTUATION VOLTAGES; CRYOGENIC COOLING SYSTEM; DISTRIBUTED COOLING; INLET PRESSURES; MODULATION CAPABILITY; PIEZOELECTRIC STACK ACTUATORS; REFRIGERANT FLOW; SILICON ON INSULATOR WAFERS;

SOLID-STATE SENSORS;

EID: 41849143101 PISSN: None EISSN: None Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper

Times cited : (4)

References (6)

1
- 0033741710
- MEMS Micro-valve for Space Applications
- V., pp
- I. Chakraborty, W.C. Tang, D.P. Bame, T.K. Tang, “MEMS Micro-valve for Space Applications,” Sensors and Actuators, V. 83, pp. 188-193, 2000
- (2000) Sensors and Actuators , vol.83 , pp. 188-193
- Chakraborty, I.¹ Tang, W.C.² Bame, D.P.³ Tang, T.K.⁴

2
- 0024764864
- Normally Closed Microvalve and Micropump Fabricated on a Silicon Wafer
- V., pp
- M. Esashi, S. Shoji, A. Nakano, “Normally Closed Microvalve and Micropump Fabricated on a Silicon Wafer,” Sensors and Actutors, V. 20, pp. 163-169, 1989
- (1989) Sensors and Actutors , vol.20 , pp. 163-169
- Esashi, M.¹ Shoji, S.² Nakano, A.³

3
- 0026374786
- Smallest Dead Volume Microvalves for Integrated Chemical Analyzing Systems
- S. Shoji, B. Schoot, N. Rooij, M. Esashi, “Smallest Dead Volume Microvalves for Integrated Chemical Analyzing Systems,” Transducers ’91, pp. 1052-1055, 1991
- (1991) Transducers ’91 , pp. 1052-1055
- Shoji, S.¹ Schoot, B.² Rooij, N.³ Esashi, M.⁴

4
- 52249088341
- A Piezoelectric Liquid-Compatible Microvalve for Integrated Micropropulsion
- Hilton Head Isl., SC, 6/6-10/04
- C. Lee, E.H. Yang, “A Piezoelectric Liquid-Compatible Microvalve for Integrated Micropropulsion,” Technical Digest of the 2004 Solid-State Sensor and Actuator Workshop, Hilton Head Isl., SC, 6/6-10/04, pp. 160-163, 2004
- (2004) Technical Digest of the 2004 Solid-State Sensor and Actuator Workshop , pp. 160-163
- Lee, C.¹ Yang, E.H.²

5
- 85062340508
- Measurements of the Material Properties of a Laminated Piezoelectric Stack at Cryogenic Temperatures
- in press
- R.P. Taylor, G.F. Nellis, S.A. Klein, D.W. Hoch, J. Fellers, P. Roach, J.M. Park, Y. Gianchandani, “Measurements of the Material Properties of a Laminated Piezoelectric Stack at Cryogenic Temperatures,” International Cryogenic Materials Conference, 2005, in press.
- (2005) International Cryogenic Materials Conference
- Taylor, R.P.¹ Nellis, G.F.² Klein, S.A.³ Hoch, D.W.⁴ Fellers, J.⁵ Roach, P.⁶ Park, J.M.⁷ Gianchandani, Y.⁸

6
- 0033307723
- 3D Microstructuring of Glass Using Electrochemical Discharge Machining (ECDM)
- pp
- V. Fascio, R. Wuthrich, D. Viquerat, H. Langen, “3D Microstructuring of Glass Using Electrochemical Discharge Machining (ECDM),” International Symposium on Micromechatronics and Human Science, pp. 179-183, 1999
- (1999) International Symposium on Micromechatronics and Human Science , pp. 179-183
- Fascio, V.¹ Wuthrich, R.² Viquerat, D.³ Langen, H.⁴

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.