Proportional microvalve using a bi-stable magnetic actuator

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1997, Pages 233-237

  Shinozawa, Yasuhiko ^a   Abe, Takeshi ^a   Kondo, Takehiko ^a  

^a TOKYO GAS CO LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ELECTRIC COILS; ELECTRIC CURRENT CONTROL; HYDRAULIC CONTROL EQUIPMENT; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; PERMANENT MAGNETS;

BISTABLE MAGNETIC ACTUATORS; ELECTROMAGNETIC MINIATURE VALVES; MICROMACHINED COILS;

VALVES (MECHANICAL);

EID: 0030709188     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)